Calibration of straight total reflection X-ray fluorescence spectrometry — results of a European Round Robin test

Rink, Ingrid; Rostam-Khani, P.; Knoth, J.; Schwenke, H.; Gendt, Stefan De; Wortelboer, R.

doi:10.1016/s0584-8547(01)00297-x

Cited by 13 publications

(10 citation statements)

References 3 publications

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“…However, other methods may be used if they yield equivalent results to the reference methods. Due to continued research and development [22], Total Reflection X-Ray Fluorescence analysis TXRF has become a well-accepted chemical technique for quality control in the semiconductor industry [23]. The reflection of X-Rays close to the critical angle makes this technique extremely sensitive with improvements in limits of detection.…”

Section: Introductionmentioning

confidence: 99%

A new non-destructive method for chemical analysis of particulate matter filters: The case of manganese air pollution in Vallecamonica (Italy)

Borgese

Zacco

Pal

et al. 2011

Talanta

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Total Reflection X-ray Fluorescence (TXRF) is a well-established technique for chemical analysis, but it is mainly employed for quality control in the electronics semiconductor industry. The capability to analyze liquid and uniformly thin solid samples makes this technique suitable for other applications, and especially in the very critical field of environmental analysis. Comparison with standard methods like Inductively Coupled Plasma (ICP) and Atomic Absorption Spectroscopy (AAS) show that TXRF is a practical, accurate, and reliable technique in occupational settings. Due to the greater sensitivity necessary in trace heavy metal detection, TXRF is also suitable for environmental chemical analysis. In this paper we show that based on appropriate standards, TXRF can be considered for non-destructive routine quantitative analysis of environmental matrices such as air filters. This work has been developed in the frame of the EU-FP6 PHIME (Public Health Impact of long-term, low-level Mixed element Exposure in susceptible population strata) Integrated Project (www.phime.org). The aim of this work was to investigate Mn air pollution in the area of Vallecamonica (Italy).

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Section: Introductionmentioning

confidence: 99%

A new non-destructive method for chemical analysis of particulate matter filters: The case of manganese air pollution in Vallecamonica (Italy)

Borgese

Zacco

Pal

et al. 2011

Talanta

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“…7. Calibration of TXRF: measured and calculated angular dependency of (a) a droplet residue standard (after Knoth et al [75]) versus, (b) a spin-coated standard (after Rink et al [84]), (c) a bulk type standard (after Knoth et al [75] Advantages of using a film type calibration sample are in:…”

Section: Calibration Using a Film Type Standard Samplementioning

confidence: 99%

“…Theoretically it is assumed that the film thickness is constant and ≤ 1 nm that results in the same angular dependence under all conditions. In practice however, the film thickness can be thicker [84]. It has been shown in a round robin test that these issues with e.g.…”

Section: Calibration Using a Film Type Standard Samplementioning

confidence: 99%

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Trends in total reflection X-ray fluorescence spectrometry for metallic contamination control in semiconductor nanotechnology

Hellin

Gendt

Valckx

et al. 2006

Spectrochimica Acta Part B: Atomic Spectroscopy

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“…Over several years, total reflection X‐ray fluorescence (TXRF) spectroscopy has become known as a versatile tool for elemental analysis across many application fields . TXRF is an advanced technique for surface chemical analysis which, within ISO, was originally applied to measure and control the contamination of silicon wafers to support the semiconductor industry . It was then further exploited in other application fields where there was a demand for measuring low mass volumes where the sample was then deposited onto X‐ray reflective surfaces.…”

Section: Introductionmentioning

confidence: 99%

Summary of ISO standard 20289: Total reflection X‐ray fluorescence analysis of water

Borgese

Bilo

Federici

et al. 2019

Surface & Interface Analysis

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The International Standard Organization (ISO) 20289 provides a method for determining the elemental concentration of impurities dissolved in water samples. It exploits total reflection X-ray fluorescence (TXRF) spectroscopy to measure a dried residue on an X-ray reflector. The scope is to provide a chemical metrology for quantitative analysis to obtain traceable results within a defined degree of accuracy and precision according to good practice and in compliance with ISO 17025. Target users include technicians working in laboratories who perform routine analysis of large numbers of samples. The method is specifically focused on determining elements dissolved in drinking, surface and ground water, but it can be also extended to waste waters and eluates if dilution steps are considered. The standard includes the description of all reagents, standards, and materials, including suitable reference materials, which are needed to prepare the sample and ensure quality assurance and control protocols. In addition, the standard presents a detailed description of sample preparation, contributions factors affecting the uncertainty budget, the general procedure to check instrumental calibration, determining limits of detection and quantification, and methods for spectra fitting.

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Calibration of straight total reflection X-ray fluorescence spectrometry — results of a European Round Robin test

Cited by 13 publications

References 3 publications

A new non-destructive method for chemical analysis of particulate matter filters: The case of manganese air pollution in Vallecamonica (Italy)

A new non-destructive method for chemical analysis of particulate matter filters: The case of manganese air pollution in Vallecamonica (Italy)

Trends in total reflection X-ray fluorescence spectrometry for metallic contamination control in semiconductor nanotechnology

Summary of ISO standard 20289: Total reflection X‐ray fluorescence analysis of water

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