Calibration of the retardation inhomogeneity for the compensator-rotating imaging ellipsometer

Jin, Lianhua; Iizuka, Yuki; Iwao, Takashi; Kondoh, Eiichi; Uehara, Makoto; Gelloz, Bernard

doi:10.1364/ao.58.009224

Cited by 6 publications

(1 citation statement)

References 15 publications

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“…For the Si thin film / quartz (Si/SiO2) sample, the reflection and transmission ellipsometric parameters were acquired with a home-built ellipso-microscope, which can be used in either reflection or transmission configurations. Figures 1 illustrates the optical arrangement of the ellipso-microscope, which was built based on our previous work [13][14][15][16]. The light from the Xenon lamp passes through an optical filter (=5905 nm), a convergence lens system (NAc=0.0088), a linear Gran-Thompson polarizer, and a compensator (a quarter wave-plate).…”

Section: Instrumentationmentioning

confidence: 99%

Reflection and transmission ellipsometry measurement under incoherent superposition of light

Kitamura,

Mogi,

Muranaka

et al. 2023

Optical Technology and Measurement for Industrial Applications Conference

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Optical constants and thickness of a single layer on the transparent substrate can be extracted simultaneously from four ellipsometric parameters - 𝑟 , ∆ 𝑟 ,  𝑡 , ∆ 𝑡 -, which are obtained through reflection and transmission ellipsometry measurement at a single wavelength and a single incidence angle. A transparent substrate, however, induces the problem of backside reflections, and then incoherent superposition of light. In this work, the effects of such reflections were empirically investigated as a function of incident angle and analyzed by using single-point measurement results obtained with a commercialized spectroscopic ellipsometer. Our study shows that at the Brewster angle illumination, the effect of backside reflection can be minimized. Based on this result, a reflection and transmission imaging ellipsometer was configured for the measurement of a Si film deposited on a quartz glass plate. The measurement results showed the availability, as well as the limitation, of the reflection and transmission imaging ellipsometry.

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Section: Instrumentationmentioning

confidence: 99%