1990
DOI: 10.1016/0042-207x(90)94192-s
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Calibration of vacuum systems by gas quantities

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Cited by 16 publications
(7 citation statements)
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“…The following gases have been calculated to be present using the computer program SGAP (Dobrozemsky, 1972): H 2 O, H 2 , CH 4 , C 2 H 6 , C 3 H 8 , CO, CO 2 , N 2 , H 2 S and SO 2 . Artificial gas mixtures of known compositions were used for calibration (Dobrozemsky, 1990).…”
Section: Methodsmentioning
confidence: 99%
“…The following gases have been calculated to be present using the computer program SGAP (Dobrozemsky, 1972): H 2 O, H 2 , CH 4 , C 2 H 6 , C 3 H 8 , CO, CO 2 , N 2 , H 2 S and SO 2 . Artificial gas mixtures of known compositions were used for calibration (Dobrozemsky, 1990).…”
Section: Methodsmentioning
confidence: 99%
“…13 The common idea of all these methods is to achieve higher accuracy in the total quantities by comparing the mass spectrometer reading with the reading of a pressure gage. 7 However, such a calibration is not possible for unstable species such as radicals. There is no way to an absolute calibration for them, although approximate estimates may be obtained from a comparison with similar stable molecules.…”
Section: The Likelihoodmentioning
confidence: 99%
“…The actual value of i must be determined by calibrating the quadrupole mass spectrometer. Several different pathways are mentioned in the literature, namely the gas expansion from a calibrated volume, 7 the flash filament method 12 or the gas-injection method. 13 The common idea of all these methods is to achieve higher accuracy in the total quantities by comparing the mass spectrometer reading with the reading of a pressure gage.…”
Section: The Likelihoodmentioning
confidence: 99%
“…In the throughput method, the total quantity of gas evolved from a sample is determined from the integrated time-dependent pressure change in the apparatus due to outgassing of the sample. Similar techniques (also referred to as gas-burst methods) have been applied for the calibration of vacuum instruments, 4 for the determination of water outgassing from a stainless steel chamber, 5 for the calibration of getter pumps, 6 and for the determination of water coverage on technical surfaces. 7 In the present work, data from the throughput method is modeled to determine D H2O and the total gas desorbed.…”
Section: Introductionmentioning
confidence: 99%