Calibration verification of a low-cost method for MEMS accelerometers

Parsi, Behzad; Bahrami, Mohsen; Esfahani, Amir Monemian; Sany, B Seyedzadeh

doi:10.1177/0142331213513607

Cited by 10 publications

(5 citation statements)

References 11 publications

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“…Nevertheless, applying controllers to MEMS-based voltage reference sources is necessary because it has great impact on increasing the long term stability and accuracy of reference voltage. It is not blowing it out of proportion that applying various control algorithms to MEMS devices to yield error subside and a better performance is a nonnegligible problematic issue [9][10][11][12][13][14]. In addition, adaptive and robust control methods lie in the center of meticulousness and challenge due to deficiency in modeling of MEMS devices and the parametric uncertainties in fabrication procedures [15][16][17][18][19][20][21][22].…”

Section: Introductionmentioning

confidence: 99%

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Ranjbar

Mehrnezhad

Suratgar

2017

Journal of Control Science and Engineering

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The accuracy of physical parameters of a tunable MEMS capacitor, as the major part of MEMS AC voltage reference, is of great importance to achieve an accurate output voltage free of the malfunctioning noise and disturbance. Even though strenuous endeavors are made to fabricate MEMS tunable capacitors with desiderated accurate physical characteristics and ameliorate exactness of physical parameters' values, parametric uncertainties ineluctably emerge in fabrication process attributable to imperfections in micromachining process. First off, this paper considers applying an adaptive sliding mode controller design in the MEMS AC voltage reference source so that it is capable of giving off a well-regulated output voltage in defiance of jumbling parametric uncertainties in the plant dynamics and also aggravating external disturbance imposed on the system. Secondly, it puts an investigatory comparison with the designed model reference adaptive controller and the pole-placement state feedback one into one's prospective. Not only does the tuned adaptive sliding mode controller show remarkable robustness against slow parameter variation and external disturbance being compared to the pole-placement state feedback one, but also it immensely gets robust against the external disturbance in comparison with the conventional adaptive controller. The simulation results are promising.

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Section: Introductionmentioning

confidence: 99%

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Ranjbar

Mehrnezhad

Suratgar

2017

Journal of Control Science and Engineering

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“…Table II shows the natural frequency, which is calculated by analytic solution and FEM modeling. The absolute percentage error (APD) is calculated by the following equation [14][15]:…”

Section: Fem Modeling and Experimental Setupmentioning

confidence: 99%

Vibration Analysis Of A Double Circular Pzt Actuator For A Valveless Micropump

Parsi¹,

Zhang²,

Mašek³

2018

Progress in Canadian Mechanical Engineering

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In the conventional mechanical micropumps, the motion from one component (such as gear or diaphragm) produces pressure difference, which is needed to move fluid. In this paper, we propose a new method to use double PZT layers as an actuator for a valveless micropump, which is designed for pumping blood. Due to the high surface tension of blood, one PZT actuator is not strong enough to produce sufficient displacement. So instead of one PZT layer, a double-PZT layer is utilized to produce movement force. In this research, the analytic equations of a double circular PZT layer are derived to express the natural frequency of the system. The finite element method (FEM) simulation is utilized to verify the analytic equations. Then the required input voltage is applied to maximize the functionality of the system, whose simulation results are compared with the experimental measurement setup. Finally, a typical valveless micropump with the proposed double PZT layer is simulated by using COMSOL Multiphysics software. The flow rate of this configuration is compared with a single PZT actuator to demonstrate the effect of the proposed double-PZT actuator on the application to the valveless micropumps.

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“…It is vital to consider the dynamics of the rotating machines in the design stage to avoid catastrophic failures that may occur because of resonance condition in their operation. Dynamic analysis of rotating machines and turbo machinery rotors has been performed by many researchers and finite element method has been of interest of many researchers recently as a numerically efficient method to analyze the dynamics of rotating machines and mechanical structures [5][6][7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

On The Finite Element Modeling Of Turbo Machinery Rotors In Rotor Dynamic Analysis

Jalali¹,

Nouri²,

Ziaei-Rad³

2018

Progress in Canadian Mechanical Engineering

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In this study, a program based on finite element method is developed for rotor dynamic analysis of gas turbine rotors. In the FE model of the rotors, various minor and major parts of the rotor are modeled using the cylindrical and tapered Timoshenko beam elements and the lateral vibration behavior of the rotor is evaluated. In the paper, the lateral vibration behavior of a certain gas turbine rotor is analyzed using the developed finite element program and coupled lateral-torsional vibration behavior of the rotor is analyzed using 3D finite element model. A good agreement exists between the results obtained from two FE models. Two design models are used for the rotor one of which has 2 bearings and the other one has 4 bearings with specific locations. The effects of the number of the bearings on the critical speeds, operational deflection shapes and unbalance response of the rotor is investigated. It is found that the number of the bearings has significant effect on the first critical speed but slight effect on the second and third critical speeds. It is demonstrated that the number of the bearings can be used as one of the system design parameters.

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Calibration verification of a low-cost method for MEMS accelerometers

Cited by 10 publications

References 11 publications

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Vibration Analysis Of A Double Circular Pzt Actuator For A Valveless Micropump

On The Finite Element Modeling Of Turbo Machinery Rotors In Rotor Dynamic Analysis

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