Cantilever Based Series Metal Contact RF MEMS Switch with Reduced Pull-in voltage and RF losses

Abstract

In this paper, a cantilever-based series metal contact radio frequency micromechanical switch is designed with reduced pull-in voltage and RF losses. The paper also discusses the cantilever structural analysis. The analysis is extended with single and multiple contact regions. The switch RF losses are reduced by placing separate contact regions. The circular holes are placed to micromechanical structure which eventually helped to minimize the necessary pull-in voltage. The RF MEMS switch proposed in this paper is offering an pull-in voltage of 8.5V, insertion losses -0.62dB, isolation losses -62dB.