2010
DOI: 10.1117/12.842837
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Cantilever couplers for fiber coupling to silicon photonic integrated circuits

Abstract: Cantilever couplers for fiber coupling to silicon photonic integrated circuits are presented. The couplers consist of silicon inverse width tapers embedded within silicon dioxide cantilevers that are deflected out-of plane by residual stress. Coupling efficiencies of 1.6 dB per connection for TE polarization and 2 dB per connection for TM polarization are achieved. Finite difference time domain simulations are conducted to assess coupling loss as a function of cantilever geometry and fiber-to-cantilever misali… Show more

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