2017
DOI: 10.1016/j.ijsolstr.2016.11.013
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Cantilever dynamics in higher-harmonic atomic force microscopy for enhanced material characterization

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Cited by 19 publications
(15 citation statements)
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“…An improvement of the frequency stabilization was reported as driving the arch resonator in the internal resonance regime as shown previously by Antoine et al [31]. Internal resonance was also observed and exploited in carefully designed structures to get commensurate ratios between different modes such as the H-shapes structures [161] and the microcantilevers with outer and inner paddles [162,163]. As conferred in this section, mode coupling among different modes of vibrations has been investigated deeply in the literature using M/NEMS resonators.…”
Section: Internal Resonancementioning
confidence: 56%
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“…An improvement of the frequency stabilization was reported as driving the arch resonator in the internal resonance regime as shown previously by Antoine et al [31]. Internal resonance was also observed and exploited in carefully designed structures to get commensurate ratios between different modes such as the H-shapes structures [161] and the microcantilevers with outer and inner paddles [162,163]. As conferred in this section, mode coupling among different modes of vibrations has been investigated deeply in the literature using M/NEMS resonators.…”
Section: Internal Resonancementioning
confidence: 56%
“…In the past few decades, internal resonance in M/NEMS has been widely studied in various structures including cantilevers [162,163], arch beams [32,123,156], membranes from 2D material (such as graphene and MoS2) [122,142], CNTs [164], and electrically and mechanically coupled structures [31,158,161].…”
Section: Internal Resonancementioning
confidence: 99%
“…Recent works, however, have shown that a microcantilever specifically designed to realize internal resonance can trigger two modes even with single-frequency excitation. Specifically, in [73][74][75][76], a microcantilever was designed with an inner paddle, as shown in figure 6, so that the linearized frequencies of the leading bending modes of the base cantilever and the inner paddle are in a 1 : n rational relationship. When nonlinearity is included in the dynamics through the strong non-smooth nonlinear tip-sample interactions generated during the AFM tapping operation, a strong nth harmonic component is passively triggered in the response of the paddle via the internal resonance mechanism.…”
Section: Internal Resonancementioning
confidence: 99%
“…The experimental characterization of these systems has clearly shown the characteristic dynamic features due to internal resonance, exotic M-shaped resonance curve, nonlinear energy transfer and amplitude saturation, as illustrated in figure 5d-f. Autoparametric amplification was also reported in a micromechanical disc resonator due to internal resonance between the degenerate vibrational modes, when the frequencies of these modes are electrostatically tuned to match perfectly [70]. Internal resonance has also been exploited in a microcantilever design to achieve multifrequency atomic force microscopy (AFM) [71][72][73][74][75][76]. Various schemes of multifrequency AFM have been developed to characterize a sample beyond topography [22].…”
Section: Internal Resonancementioning
confidence: 99%
“…For instance, the transfer of excessive energy through strong intermodal coupling can stabilize the frequency fluctuations in a micro/nanomechanical oscillator [28][29][30][31] and enable the detection of angular rate signals in Coriolis vibratory gyroscopes 32,33 . The IR mode can also be employed as an additional sensing channel to measure two different physical quantities simultaneously [34][35][36] . In addition, the faster energy exchange between the internal modes than that caused by the environmental source can provide an efficient route to engineering the intrinsic dissipation of an oscillator [37][38][39] .…”
Section: Introductionmentioning
confidence: 99%