Cantilever-in-cantilever micromachined pressure sensors fabricated in CMOS technology

Brown, K.B.; Allegretto, W.; Vermuelen, F.E.; Lawson, R. P. W.; Robinson, A. M.

doi:10.1109/ccece.1999.804971

Cited by 4 publications

(3 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…All plots are straight line fits between the data points, taken at frequency steps of 20 Hz. To validate our linear model assumption single degree-of-freedom modal testing was performed by examination of the response curves near resonance, the results of which indicating that each device is well approximated by a classical linear oscillator model under damped conditions [14,15]. The response of the triple CIC shows a small additional peak, and that of the double CIC exhibits a small dip, at frequencies below the resonance frequencies.…”

Section: Resultsmentioning

confidence: 99%

“…Furthermore, if ω dr = ω j , the resonant frequency of the jth eigenvalue, λ j , and no other resonant frequencies occur in proximity of ω j , then z reduces approximately to z(x, y) ∼ = c j (t)ϕ j (x, y). Substituting into (3.1) for k = 0 and ω dr = ω j leads to [14]…”

Section: Resonance Theorymentioning

confidence: 99%

“…This result has the familiar form of a point mass on a spring with damping. Equation (3.7) predicts a decrease in ω 1 as the damping ρ 1 increases, which it will with an increase in pressure p. Since we assume that the first resonant mode is separated sufficiently from higher order modes, we can write z(x, y) ∼ = c 1 (t)ϕ 1 (x, y) and furthermore, the maximum value of the deflection at ω 1 is [14]…”

Section: Resonance Theorymentioning

confidence: 99%

See 2 more Smart Citations

Simple resonating microstructures for gas pressure measurement

Brown

Allegretto

Vermeulen

et al. 2002

J. Micromech. Microeng.

View full text Add to dashboard Cite

The resonance characteristics of an oscillating microcantilever are modified due to the changing damping effects as the ambient air pressure varies, and the device is used as an absolute pressure sensor. Three variations of the microcantilever device were designed, fabricated, and tested for changes in resonant frequency, quality factor, amplitude of oscillation, and actuating current required to maintain the amplitude of oscillation constant as the ambient pressure was varied from 15 to 1450 Torr. The device has been analyzed and a relationship has been derived to aid in the prediction of device behavior. Values for precision comparable to commercial pressure sensors are also presented for each method of detection.

show abstract

Section: Resultsmentioning

confidence: 99%

Section: Resonance Theorymentioning

confidence: 99%

Section: Resonance Theorymentioning

confidence: 99%

See 1 more Smart Citation

Simple resonating microstructures for gas pressure measurement

Brown

Allegretto

Vermeulen

et al. 2002

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

Measuring the deflection of a micromachined cantilever-in-cantilever device using a piezoresistive sensor

Robinson²,

Lawson³

et al.

Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99

Self Cite

View full text Add to dashboard Cite

We have designed and tested a piezoresistor for detecting deflection of micromachined Cantilever-In-Cantilever devices making use of the polycrystalline siliconflm of the Mite1 1.5 pm CMOS IC fabrication process. Both static deflection and resonance measurements have been investigated. The change of piezoresistance is about 0.06% under static deflection, which agrees with the ANSYS simulation results. Under dynamic excitation, the piezoresistance AC signal varies linearly with angular deflection of the cantilever, although the variation depends onthe resonance mode. The resonant frequencies of the modes can readily be determined using the piezoresistor.

show abstract