Capability of tip-enhanced Raman spectroscopy about nanoscale analysis of strained silicon for semiconductor devices production

Abstract

Localized strained silicon was observed with a suitable resolution in a real semiconductor device\ud by tip-enhanced Raman spectroscopy (TERS). The device was made via a standard industrial process\ud and its silicon trench isolation structures were used for the silicon strain analysis obtaining\ud results according to finite element method-based simulation data. We have achieved a reliable and\ud repeatable enhancement factor obtaining a trace of strained silicon along the structure with suitable\ud nanometer spatial resolution compatible with IC industry requirements. We demonstrate that the\ud complexity to analyze a real 3D structure, directly from the production lines and not ad hoc realized,\ud entails the challenges to individuate the optimal tip shape, tip contact angle, tip composition,\ud tip positioning system, laser power, and wavelength to achieve an appropriate plasmon resonance\ud inducing a relevant signal to noise ratio. This work gives the base to address the development in\ud TERS optimization for real industrial applications

Atomic Force microscopy techniques to investigate activated food packaging materials

“…In addition, the intensity of the Raman signal corresponding to a specific chemical bond can be mapped on the sample surface. TERS has been used for different applications: in biology and organic chemistry to study proteins, viruses, DNA, porphyrins, and self-assembled monolayers, in materials science and nanotechnology to study carbon nanomaterials, in particular carbon nanotubes and graphene (Deckert-Gaudig, Taguchi, Kawata, & Deckert, 2017), to investigate solid-liquid and electrochemical interfaces (Wang et al, 2017), as well as in semiconductor technology and electronic devices for nanoscale strain analysis (Lucia et al, 2017;Tarun, Hayazawa, & Kawata, 2009).…”

Identification of nanoparticles and nanosystems in biological matrices with scanning probe microscopy

“…TERS is finding increasing applications in nanobioscience, for example, in the study of single molecules, DNA/RNA, bacteria and cells (Bailo & Deckert, 2008;Yeo et al, 2009). Also, TERS finds application in material science and nanotechnology, for example, in the characterization of nanomaterials, for example, single-walled carbon nanotubes (SWCNTs)-commonly used as samples to demonstrate the nanometer lateral resolution of TERS which can be even higher than that of standard AFM topography (Bailo & Deckert, 2008)-or of microelectronics devices, for example, in the nanoscale study of strain (Hayazawa et al, 2007;Lucia et al, 2017;Peng et al, 2009;Saito, Motohashi, Hayazawa, & Kawata, 2008;Tarun, Hayazawa, & Kawata, 2009).…”

Spectroscopic Imaging at the Nanoscale: Technologies and Recent Applications

“…In addition to the above-mentioned materials, the advantages of TERS have also been exploited to study properties of other inorganic oxide samples, including iron oxide nanoparticles, 69 double perovskite thin films, 70 and strained silicon for semiconductor devices. 71 TERS in Life Sciences. DNAs.…”