Accurate and unobtrusive monitoring of surface biopotentials is of paramount importance for physiological studies and wearable healthcare applications. Thin, light-weight, and conformal bioelectrodes are highly desirable for biopotential monitoring. This report demonstrates the fabrication of sub-300 nm thin, dry electrodes that are self-adhesive and conformable to complex 3D biological surfaces and thus capable of excellent quality of biopotential (surface electromyogram and surface electrocardiogram) recordings. Measurements reveal single-day stability of up to 10 h. In addition, the bending stiffness of the sensor is calculated to be ≈0.33 pN m 2 , which is comparable to stratum corneum, the uppermost layer of human skin, and this stiffness is over two orders of magnitude lower than the bending stiffness of a 3.0 µm thin sensor. Laminated on a prestretched elastomer, when relaxed, the sensor forms wrinkles with a period and amplitude equal to 17 and 4 µm, respectively, which these values agree with theoretical calculations. Finally, with skin vibrations of up to ≈15 µm, the sensor exhibits motion artifact-less monitoring of surface biopotentials, in contrast to a wet adhesive electrode that shows much greater influence.