Capacitive coupled RF discharge: modelling at the local statement of the problem

Numerical solution of the model problem of CCRF-discharge at atmospheric pressure

“…Numerical algorithm of simulating of CCRF-discharge at atmospheric pressure is the same as the ones used for simulation of the same problem at low pressure which is described in the paper [18,19]. This algorithm is based on the method of transferring of non-linearity in equation coefficients to the lower time layer.…”

Experimental installation for study the low-power ICRF plasma at low pressures with equipment for experiment data synchronization

“…One of the advantages of this kind of plasmas is its temperature ("cold" plasma), so material surface is not heated to critical temperatures at processes ofplasma modification of different materials [3,4]. The installation will let us to verifyresults of mathematical simulation of nonlinear processes occurring in the low pressure RF plasma [5,6], as well as processes of interaction with a sample. Special attention is paid to synchronization of incoming data such as gas flow rate, gas pressure in a vacuum chamber, temperature, and electron energy distribution function (EEDF).…”

Математическая Модель Тлеющего Разряда

“…НТП используется для получения дисперсных материалов, обработки порошков и получения покрытий, модификации поверхностей полимерных материалов; использование плазмы для решения различных задач прикладной химии (плазмохимии); применение низкотемпературной плазмы в экологии [1][2][3][4][5][6][7][8]. Электрические разряды, характеризуемые сравнительно малыми токами и вкладываемой мощностью разряда, называются тлеющими.…”