Capacitive humidity-sensitivity of carbonized silicon nanoporous pillar array

Wang, Hai Yan; Li, Xin Jian

doi:10.1016/j.matlet.2010.03.005

Cited by 11 publications

(4 citation statements)

References 17 publications

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“…Utilizing Si-NPA or its nanocomposite systems as sensing media, several kinds of humidity or gas sensors with high sensitivity, short response/recovery times and small hysteresis have been prepared [205][206][207]. These results indicate that Si-NPA is a potential system both as a direct sensing material and a template for growing other sensing materials.…”

Section: Gas Detectionmentioning

confidence: 91%

“…catalyst-assisted chemical vapor deposition (CVD) method, large quantities of SiCNWs having 15 nm average diameter were grown on Si-NPA [186,206]. Through evaporating coplanar interdigital silver electrodes on the sample surface, the room-temperature capacitive humidity sensing properties of nw-SiC/Si-NPA were studied.…”

Section: A C C E P T E D Accepted Manuscriptmentioning

confidence: 99%

See 1 more Smart Citation

Chemistry of one dimensional silicon carbide materials: Principle, production, application and future prospects

Prakash

Venugopalan

Tripathi

et al. 2015

Progress in Solid State Chemistry

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Section: Gas Detectionmentioning

confidence: 91%

Section: A C C E P T E D Accepted Manuscriptmentioning

confidence: 99%

Chemistry of one dimensional silicon carbide materials: Principle, production, application and future prospects

Prakash

Venugopalan

Tripathi

et al. 2015

Progress in Solid State Chemistry

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“…The ambient conditions such as humidity, temperature and air flow are highly influential on the efficiency of PEMFCs, therefore, the optimum performance of fuel cell systems can be only achieved by the recognition and control of these conditions through the design and utilization of expert sensor systems [ 374 ]. However, shortcomings of available humidity sensors for working at high temperature ambient in the presence of invariantly high humidity levels made them unsuitable for PEMFC applications, thereby motivating the need to develop and the evolution of micro-flexible resistive [ 375 , 376 ] and capacitive [ 377 , 378 ] humidity sensing systems integrated into the fuel cell systems [ 379 , 380 ].…”

Section: Capacitive Type Humidity Sensorsmentioning

confidence: 99%

Humidity Sensors Principle, Mechanism, and Fabrication Technologies: A Comprehensive Review

Farahani

Wagiran

Hamidon

2014

Sensors

1,045

562

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Humidity measurement is one of the most significant issues in various areas of applications such as instrumentation, automated systems, agriculture, climatology and GIS. Numerous sorts of humidity sensors fabricated and developed for industrial and laboratory applications are reviewed and presented in this article. The survey frequently concentrates on the RH sensors based upon their organic and inorganic functional materials, e.g., porous ceramics (semiconductors), polymers, ceramic/polymer and electrolytes, as well as conduction mechanism and fabrication technologies. A significant aim of this review is to provide a distinct categorization pursuant to state of the art humidity sensor types, principles of work, sensing substances, transduction mechanisms, and production technologies. Furthermore, performance characteristics of the different humidity sensors such as electrical and statistical data will be detailed and gives an added value to the report. By comparison of overall prospects of the sensors it was revealed that there are still drawbacks as to efficiency of sensing elements and conduction values. The flexibility offered by thick film and thin film processes either in the preparation of materials or in the choice of shape and size of the sensor structure provides advantages over other technologies. These ceramic sensors show faster response than other types.

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“…Wang measured the humidity of silicon nitride ceramics using a capacitive humidity sensor. The time to respond from high to low humidity was short [ 17 ]. Chang fabricated zinc oxide nanowires on a silicon chip, in the form of a resistive humidity sensor, to sense humidity [ 18 ].…”

Section: Theory and Design Of Micro Sensorsmentioning

confidence: 99%

A Novel Method for In-Situ Monitoring of Local Voltage, Temperature and Humidity Distributions in Fuel Cells Using Flexible Multi-Functional Micro Sensors

Lee

Fan

Chang

2011

Sensors

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In this investigation, micro voltage, temperature and humidity sensors were fabricated and integrated for the first time on a stainless steel foil using micro-electro-mechanical systems (MEMS). These flexible multi-functional micro sensors have the advantages of high temperature resistance, flexibility, smallness, high sensitivity and precision of location. They were embedded in a proton exchange membrane fuel cell (PEMFC) and used to simultaneously measure variations in the inner voltage, temperature and humidity. The accuracy and reproducibility of the calibrated results obtained using the proposed micro sensors is excellent. The experimental results indicate that, at high current density and 100%RH or 75%RH, the relative humidity midstream and downstream saturates due to severe flooding. The performance of the PEM fuel cell can be stabilized using home-made flexible multi-functional micro sensors by the in-situ monitoring of local voltage, temperature and humidity distributions within it.

show abstract

Capacitive humidity-sensitivity of carbonized silicon nanoporous pillar array

Cited by 11 publications

References 17 publications

Chemistry of one dimensional silicon carbide materials: Principle, production, application and future prospects

Chemistry of one dimensional silicon carbide materials: Principle, production, application and future prospects

Humidity Sensors Principle, Mechanism, and Fabrication Technologies: A Comprehensive Review

A Novel Method for In-Situ Monitoring of Local Voltage, Temperature and Humidity Distributions in Fuel Cells Using Flexible Multi-Functional Micro Sensors

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