Capacitive pressure sensing with suspended graphene–polymer heterostructure membranes

Berger, Christian; Phillips, R.J.; Centeno, Alba; Zurutuza, Amaia; Vijayaraghavan, Aravind

doi:10.1039/c7nr04621a

Cited by 56 publications

(47 citation statements)

References 63 publications

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“…Apart from the rapid development demonstrated in this review, there is a bright future for tactile sensors utilizing smart materials (e.g., piezoelectric, self-healing, self-powering, self-cleaning), additive manufacturing, big data analytics (e.g., artificial intelligence) and cloud computing to fulfill healthcare demand for personalized medicine and remote monitoring. We found that sensitivity was the focus for most of the developed devices [247][248][249]251,[257][258][259][260][274][275][276][277][278][279][280][281][282][283][284][285] and those with piezoresistive mechanisms generally showed high performance when compared with others [242,259,271,283,293]. Although piezocapacitive-based sensors still show excellent detectability and sensitivity, they are more susceptible to noise resulting from field interaction and fringing capacitance, as well as, other factors such as temperature [192,247,294,614].…”

Section: Discussionmentioning

confidence: 97%

“…Graphene has been used with PI, such as a porous graphene (PG) sponge [276], interdigital electrode (IDE) [285] and with PU as rGO [281] or rGO with GO [273]. Furthermore, graphene has been used with materials such as silicon nitride in MEMS [274], PEN [278], PANI wrapped sponge [279], PMMA [277], DN hydrogels [280] and EcoFlex rubber [284]. Surprisingly, graphene has been also used with other unconventional materials such as tissue paper [275] polystyrene balls [283] and even a 3M VHB Tape [282].…”

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confidence: 99%

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Blood Pressure Sensors: Materials, Fabrication Methods, Performance Evaluations and Future Perspectives

Al-Qatatsheh

Morsi

Zavabeti

et al. 2020

Sensors

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Advancements in materials science and fabrication techniques have contributed to the significant growing attention to a wide variety of sensors for digital healthcare. While the progress in this area is tremendously impressive, few wearable sensors with the capability of real-time blood pressure monitoring are approved for clinical use. One of the key obstacles in the further development of wearable sensors for medical applications is the lack of comprehensive technical evaluation of sensor materials against the expected clinical performance. Here, we present an extensive review and critical analysis of various materials applied in the design and fabrication of wearable sensors. In our unique transdisciplinary approach, we studied the fundamentals of blood pressure and examined its measuring modalities while focusing on their clinical use and sensing principles to identify material functionalities. Then, we carefully reviewed various categories of functional materials utilized in sensor building blocks allowing for comparative analysis of the performance of a wide range of materials throughout the sensor operational-life cycle. Not only this provides essential data to enhance the materials’ properties and optimize their performance, but also, it highlights new perspectives and provides suggestions to develop the next generation pressure sensors for clinical use.

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Section: Discussionmentioning

confidence: 97%

mentioning

confidence: 99%

Blood Pressure Sensors: Materials, Fabrication Methods, Performance Evaluations and Future Perspectives

Al-Qatatsheh

Morsi

Zavabeti

et al. 2020

Sensors

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show abstract

“…For these steps, the process simplicity and flexibility are determined by the selection of the sacrificial layers. The processing flow depicted in Figure 1 can be used for non-photosensitive polymeric sacrificial layers, metallic sacrificial layers or silicic ones [2,[13][14][15][16][17]. Other photoresist types can be used as sacrificial layers [6,8,18,19].…”

Section: Introductionmentioning

confidence: 99%

A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures

Cretu

2020

Micromachines

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In this paper, a simple fabrication process for SU-8 in-plane micro electro-mechanical systems (MEMS) structures, called "border-bulk micromachining", is introduced. It aims to enhance the potential of SU-8 MEMS structures for applications such as low-cost/disposable microsystems and wearable MEMS. The fabrication process is robust and uses only four processing steps to fabricate SU-8 in-plane MEMS structures, simplifying the fabrication flow in comparison with other reported attempts. The whole fabrication process has been implemented on copper-polyimide composites. A new processing method enables the direct, laser-based micromachining of polyimide in a practical way, bringing in extra processing safety and simplicity. After forming the polymeric in-plane MEMS structures through SU-8 lithography, a copper wet etching masked by the SU-8 structure layers is carried out. After the wet etching, fabricated in-plane MEMS structures are suspended within an open window on the substrate, similar to the final status of in-plane MEMS devices made from industrial silicon micromachining methods (such as SOIMUMPS). The last step of the fabrication flow is a magnetron sputtering of aluminum. The border-bulk micromachining process has been experimentally evaluated through the fabrication and the characterization of simple in-plane electrically actuated MEMS test structures. The characterization results of these simple test structures have verified the following process qualities: controllability, reproducibility, predictability and general robustness.Micromachines 2020, 11, 317 2 of 16 process to form microstructures, with its simplicity leading to a low fabrication cost, while SU-8 has better mechanical properties and chemical stability, in comparison with other photoresists [3,4]. For the fabrication of both out-of-plane and in-plane SU-8 electrostatic MEMS structures, the most commonly used fabrication flow is layer-by-layer surface micromachining [5][6][7][8][9][10][11][12]. The generic schematic of a layer-by-layer SU-8 micromachining process is illustrated in Figure 1.Micromachines 2020, 11, x 2 of 17The fabrication cost, speed and process simplicity are vital to polymeric MEMS structures and their applications. This explains why SU-8 series negative photoresist has been advantageous and popular as structural layers for polymeric MEMS devices. Such processes require only a single lithography process to form microstructures, with its simplicity leading to a low fabrication cost, while SU-8 has better mechanical properties and chemical stability, in comparison with other photoresists [3,4]. For the fabrication of both out-of-plane and in-plane SU-8 electrostatic MEMS structures, the most commonly used fabrication flow is layer-by-layer surface micromachining [5][6][7][8][9][10][11][12]. The generic schematic of a layer-by-layer SU-8 micromachining process is illustrated in Figure 1.

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“…Механические свойства графена могут быть использованы для построения различных датчиков. Слабая устойчивость к изгибу листа графена может быть использована для построения высокочувствительных датчиков давления [8][9][10][11].…”

Section: Introductionunclassified

Влияние Взаимодействия Слоев На Жесткость Изгибных Деформаций Многослойных Углеродных Нанолент

Савин¹,

Савина²

2019

Физика Твердого Тела

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The effect of a weak nonbonded layers interaction on the bending resistance of a multilayered graphene nanoribbon is studied. A numerical simulation of bending of a finite multilayered nanoribbon and analysis of its bending vibrations show that interaction of layers significantly increases bending stiffness normalized to a number of layers only for nanoribbons with length L > 12 nm. The greater the length, the stronger this increase. Thus, at length L = 24 nm, layers interaction increases bending stiffness three times for a two-layer nanoribbon and six times for a nine-layer nanoribbon. Therefore, the use of multilayered nanoribbons can significantly increase the bending resistance of extended nanoconstructions.

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Capacitive pressure sensing with suspended graphene–polymer heterostructure membranes

Cited by 56 publications

References 63 publications

Blood Pressure Sensors: Materials, Fabrication Methods, Performance Evaluations and Future Perspectives

Blood Pressure Sensors: Materials, Fabrication Methods, Performance Evaluations and Future Perspectives

A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures

Влияние Взаимодействия Слоев На Жесткость Изгибных Деформаций Многослойных Углеродных Нанолент

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