Capacitive ultrasonic transducer with net backplate

Abstract

A study is presented of the function of an air-coupled capacitive ultrasonic transducer with uniform net backplate. Net backplates are an easy, fast-to-assemble alternative to grooved backplates. The frequency responses of the transducers were measured and the resonance frequencies were estimated. A procedure to study the electrostatics of the transducer with net backplate geometry is described with calculations of surface charge density distribution, capacitance and sensitivity.

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