2011
DOI: 10.1166/jnn.2011.4334
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Capacitorless 1T-DRAM on Crystallized Poly-Si TFT

Abstract: The single-transistor dynamic random-access memory (1T-DRAM) using a polycrystalline-silicon thin-film transistor (poly-Si TFT) was investigated. A 100-nm amorphous silicon thin film was deposited onto a 200-nm oxidized silicon wafer via low-pressure chemical vapor deposition (LPCVD), and the amorphous silicon layer was crystallized via eximer laser annealing (ELA) with a KrF source of 248 nm wavelength and 400 mJ/cm2 power. The fabricated capacitor less 1T-DRAM on the poly-Si TFT was evaluated via impact ioni… Show more

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Cited by 7 publications
(9 citation statements)
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“…In recent years, poly-Si 1T-DRAM has gained much attention [15][16][17][18][19][20]. This type of device stores its charge in its grain boundary (GB) instead of in the FB, and therefore it is advantageous for short channel devices; its charge can be stored in the GB even with a thin body.…”
Section: Introductionmentioning
confidence: 99%
“…In recent years, poly-Si 1T-DRAM has gained much attention [15][16][17][18][19][20]. This type of device stores its charge in its grain boundary (GB) instead of in the FB, and therefore it is advantageous for short channel devices; its charge can be stored in the GB even with a thin body.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, capacitorless one-transistor dynamic random-access memory device (1T-DRAM), which does not need capacitor fabrication, has emerged as an alternative to conventional 1T-1C-DRAM [ 1 , 2 , 3 , 4 , 5 ]. In recent years, among the various types of 1T-DRAM, poly-Si 1T-DRAM is being researched actively [ 5 , 6 , 7 , 8 , 9 , 10 , 11 ]. Poly-Si 1T-DRAM exhibits small degradation over short channels because it can operate as memory in fully depleted silicon-on-insulator (FD-SOI) structures using grain boundary (GB) [ 10 , 11 , 12 ].…”
Section: Introductionmentioning
confidence: 99%
“…Studies on poly-Si 1T-DRAM devices have focused on overcoming the limitations of conventional silicon 1T-DRAM devices and improving memory performance, and therefore, the focus has been on device-level simulation [ 4 , 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 ]. Although it is important for a single 1T-DRAM device to have adequate performance as memory, a single device cannot be used as memory.…”
Section: Introductionmentioning
confidence: 99%
“…In recent years, 1T-DRAM devices with poly-Si bodies have been studied to overcome the limitations of silicon 1T-DRAM [ 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 ]. Since the poly-Si devices use grain boundaries (GBs) instead of a FB as a charge storage region, they can perform memory operations in a FD-SOI structure [ 15 ].…”
Section: Introductionmentioning
confidence: 99%