Capillary-force-directed self-assembly of suspended nanomechanical structures above the electronic circuit layer

Cohn, Robert W.

doi:10.1117/12.2528466

Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI 2019

DOI: 10.1117/12.2528466

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Capillary-force-directed self-assembly of suspended nanomechanical structures above the electronic circuit layer

Robert W. Cohn

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Capillary-force-directed self-assembly of suspended nanomechanical structures above the electronic circuit layer

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References 35 publications

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