2007
DOI: 10.1515/joc.2007.28.2.127
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Capped Optical Polymeric Waveguide

Abstract: We present here a new type of polymer waveguides (i.e., capped waveguide) fabricated using contact photolithography with considerable performance improvement over the conventional waveguides. We also show that by simultaneous patterning of the core and the top cladding in capped waveguides, we can considerably reduce the effect of fabrication defects and reduce the propagation loss by at least 20% compared to conventional waveguides.

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Cited by 3 publications
(4 citation statements)
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“…Polymer waveguide circuits investigated in this paper are fabricated and integrated on a PCB substrate using the standard low cost PCB facilities and processes in the Next Generation Substrate Laboratory at Georgia Tech Packaging Research Center. Multiple wire layers with high interconnect density are fabricated and then multimode polymeric optical waveguides are formed on the wire layers using a novel capped-waveguide technique [8]. The waveguides are formed by spin coating the polymers and then followed with photolithography process.…”
Section: Optical Polymer Waveguide Fabricationmentioning
confidence: 99%
“…Polymer waveguide circuits investigated in this paper are fabricated and integrated on a PCB substrate using the standard low cost PCB facilities and processes in the Next Generation Substrate Laboratory at Georgia Tech Packaging Research Center. Multiple wire layers with high interconnect density are fabricated and then multimode polymeric optical waveguides are formed on the wire layers using a novel capped-waveguide technique [8]. The waveguides are formed by spin coating the polymers and then followed with photolithography process.…”
Section: Optical Polymer Waveguide Fabricationmentioning
confidence: 99%
“…We recently demonstrated a new fabrication technique for forming low-loss capped polymer waveguides using contact photolithography. 10 In this work, we present a simple, real-time, accurate, and nondestructive technique for the characterization of loss in optical waveguides that have low scattering losses, such that the application of other loss measurement techniques for the study of these waveguides is not possible.…”
mentioning
confidence: 99%
“…To improve the surface quality of these waveguides, we used a new technique in which the core and top cladding layer of the waveguide are patterned together. The details of fabrication were already reported 10 and are not repeated here. Figure 1 shows the microscope image of a high-definition and defect-free polymer capped waveguide with a core 50 m wide and 50 m thick and a 10-m-thick top cladding on an organic package substrate.…”
mentioning
confidence: 99%
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