Hydrogen emission has been studied in laser plasmas by focusing a TEA CO(2) laser (10.6 microm, 500 mJ, 200 ns) on various types of samples, such as glass, quartz, black plastic sheet, and oil on copper plate sub-target. It was found that H(alpha) emission with a narrow spectral width occurs with high efficiency when the laser plasma is produced in the low-pressure region. On the contrary, the conventional well-known laser-induced breakdown spectroscopy (LIBS), which is usually carried out at atmospheric air pressure, cannot be applied to the analysis of hydrogen as an impurity. By combining low-pressure laser-induced plasma spectroscopy with laser surface cleaning, a preliminary quantitative analysis was made on zircaloy pipe samples intentionally doped with hydrogen. As a result, a good linear relationship was obtained between H(alpha) emission intensity and its concentration.