“…To our knowledge, few attempts at low-temperature plasma-enhanced chemical vapor deposition (PECVD) of CNFs/CNTs using CO as the carbon source have been made (Han et al, 2002;Plönjes et al, 2002). In general, the advantages of low-temperature plasma CVD using CO instead of hydrocarbons as the carbon source gas are as follows: (1) the deposition of amorphous carbon is suppressed even at low temperatures (Muranaka et al, 1991;Stiegler et al, 1996); (2) the CO disproportionation reaction CO + CO → CO 2 + C is thermodynamically favorable at low temperature; (3) vibrationally excited molecules are formed and enhance reactions at low temperature, such as CO(v) + CO(v) → CO 2 + C (Capitelli et al, 1986;Mori et al, 2001;Plönjes et al, 2002). In the previous study, we have reported that the vertically aligned CNFs were able to be synthesized at temperature as low as 90 • C using low temperature CO/Ar/O 2 plasma system (Mori et al, 2007;Mori and Suzuki, 2008).…”