2015
DOI: 10.1142/s0218625x15500201
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Carbon Ion Irradiation Effects on Pulsed Laser Deposited Titanium Nitride Thin Films

Abstract: Pulse laser deposited thin¯lms of TiN are irradiated by 1 MeV carbon (C þ ) ions beam for various doses ranging 0.4 to 2:8 Â 10 14 ions/cm 2 . Atomic force microscopy (AFM) analysis reveals the formation of hillocks like structures after ion irradiation. X-ray di®raction (XRD) investigations show that the¯lm crystallinity increases for lower doses ranging from 0.4 to 1:2 Â 10 14 ions/cm 2 and decreases for higher doses (2 to 2:8 Â 10 14 ions/cm 2 ) of ions. No new bands are identi¯ed from Raman spectroscopy. H… Show more

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Cited by 4 publications
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“…For the final ion dose of 9.55 × 10 14 ions cm −2 , the hardness reduces to 112 HV (5.66%). The increase in crystallite size may be responsible for the reduction in the hardness [43]. There is an overall increase in hardness as observed in ion treated brass alloy, where all the values are higher from the untreated one.…”
Section: Resultsmentioning
confidence: 99%
“…For the final ion dose of 9.55 × 10 14 ions cm −2 , the hardness reduces to 112 HV (5.66%). The increase in crystallite size may be responsible for the reduction in the hardness [43]. There is an overall increase in hardness as observed in ion treated brass alloy, where all the values are higher from the untreated one.…”
Section: Resultsmentioning
confidence: 99%