Carbon MEMS

Martínez-Duarte, Rodrigo; Islam, Monsur; Natu, Rucha

doi:10.1007/978-94-007-6178-0_101022-1

Cited by 1 publication

(2 citation statements)

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“…Typical 2.5D structures are arrays of pillars with various cross-sections. [38,43,48] The height of such pillars ranges from a few micrometers to 100 mm. However, multistep photolithography prior to the pyrolysis step leads to even taller carbon pillars.…”

Section: Carbon Microelectromechanical System (C-mems)mentioning

confidence: 99%

“…The classical route for C‐MEMS relies on the patterning of an epoxy photoresist using UV photolithography followed by carbonization in an inert atmosphere. [ 43 ] Photolithography is the main process in microelectronics and microelectromechanical systems (MEMS) technologies and refers to the patterning of a polymer using light. Therefore, UV light is typically projected through a shadow mask onto an uncured resin layer.…”

Section: Additive Micro/nano‐manufacturing Processes For Carbonmentioning

confidence: 99%

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A Review on 3D Architected Pyrolytic Carbon Produced by Additive Micro/Nanomanufacturing

Eggeler

Chan

Sun

et al. 2023

Adv Funct Materials

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Additive micro/nano‐manufacturing of polymeric precursors combining with a subsequent pyrolysis step enables the design‐controlled fabrication of micro/nano‐architected 3D pyrolytic carbon structures with complex architectural details. Pyrolysis results in a significant geometrical shrinkage of the pyrolytic carbon structure, leading to a structural dimension significantly smaller than the resolution limit of the involved additive manufacturing technology. Combining with the material properties of carbon and 3D architectures, architected 3D pyrolytic carbon exhibits exceptional properties, which are significantly superior to that of bulk carbon materials. This article presents a comprehensive review of the manufacturing processes of micro/nano‐architected pyrolytic carbon materials, their properties, and corresponding demonstrated applications. Acknowledging the “young” age of the field of micro/nano‐architected carbon, this article also addresses the current challenges and paints the future research directions of this field.

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Section: Carbon Microelectromechanical System (C-mems)mentioning

confidence: 99%

Section: Additive Micro/nano‐manufacturing Processes For Carbonmentioning

confidence: 99%