“…In recent years resonant micro/nanoelectromechanical systems (MEMS/NEMS) [ 1 ] have received a great deal of attention from researchers in applications such as mass detection [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 ], chemical sensing [ 1 , 11 , 20 , 21 ], biosensing [ 1 , 11 , 14 , 16 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 ], and atomic force microscopy (AFM) [ 36 , 37 , 38 ]. Resonant MEMS/NEMS have also been the focus of numerous studies in the sensors-related area of vibration energy harvesting, in which the objective is often to power autonomous sensing systems that are remotely deployed [ 1 , 39 , 40 , 41 , 42 ,…”