“…Therefore, the results obtained from a 27-nm-thick parylene foil were compared with 30-nm-thick DLC foil produced by laser deposition (Micromatter, Canada). 32 Foil surface imaging and foil stiffness measurements were performed by an atomic force microscope (AFM, MFP3D, Asylum Research, USA). Both types of foils were attached on transmission electron microscopy (TEM) grids with circular aperture and mesh sizes of 10 mm (Athene RM20, Plano GmbH, Germany).…”