Carbon window soft x-ray imaging using multilayer optics

Artyukov, I. A.; Bugayev, Yegor A.; Devizenko, Oleksandr Yu.; Feschenko, Ruslan M.; Kasyanov, Yuri S.; Кондратенко, В. В.; Romanova, Svetlana A.; Saveliev, S. V.; Schäfers, F.; Feigl, Torsten; Uspenski, Yuri A.; Виноградов, А. В.

doi:10.1117/12.620037

Cited by 12 publications

(6 citation statements)

References 9 publications

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“…Thus, the structure of the C/Si bi-layer coating was determined to be amorphous. This finding was also in agreement with other works which reported that sputtered silicon and carbon films have amorphous structures [22][23][24]. EDS analysis of the C/Si bi-layer coating surface showed that there was no particular contamination on the surface.…”

Section: Synthesis and Characterization Of C/si Bi-layer Coatingssupporting

confidence: 93%

Friction and Wear Characteristics of C/Si Bi-layer Coatings Deposited on Silicon Substrate by DC Magnetron Sputtering

et al. 2012

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The tribological behavior of carbon/silicon bi-layer coatings deposited on a silicon substrate by DC magnetron sputtering was assessed and compared to that of amorphous carbon and silicon coatings. The motivation was to develop a wear resistant coating for silicon using thin layers of amorphous carbon and silicon. Wear tests were conducted by sliding a stainless steel ball against the coating specimens under applied normal loads in the range of 20 * 50 mN. Results showed that the wear rate of the bi-layer coating was strongly dependent on the ratio of thickness between the carbon and silicon layers. The wear rate of the bi-layer coating with 25 nm thick carbon and 102 nm thick silicon layers was about 48 and 20 times lower than that of the single-layer amorphous carbon and amorphous silicon coating, respectively. In addition, the steady-state friction coefficient of the bi-layer coating could be decreased to 0.09 by optimizing the thickness of the layer. Finally, a model for the wear reduction mechanism of the carbon/silicon bi-layer coating was proposed.

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Section: Synthesis and Characterization Of C/si Bi-layer Coatingssupporting

confidence: 93%

Friction and Wear Characteristics of C/Si Bi-layer Coatings Deposited on Silicon Substrate by DC Magnetron Sputtering

et al. 2012

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“…More details on the use of Co/C multilayer for the soft x-ray optics in the "carbon window" can be found in Refs. 15,16 . Since the optics is to be used in conjugation with a broadband plasma soft X-ray source, no special attention should be paid to the accurate tuning the working reflectivity bands to the wavelength of the source.…”

Section: Reflective Multilayer Coatings For the Schwarzschild Objectivementioning

confidence: 97%

Graded multilayer mirrors for the carbon window Schwarzschild objective

et al. 2008

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The paper deals with the recent progress in fabrication of the graded multilayer mirrors to be used in a 21X Schwarzschild objective operating at the wavelengths about 4.5 nm ("carbon window" region). The graded Co/C reflective multilayer coatings were fabricated using DC-magnetron sputtering. Mask-assisted deposition was used to create the required radial variation of the multilayer period. Accuracy of the multilayer's parameter measurements and quality of nm-scale layer deposition were improved significantly with application of a number of new methods and approaches. The soft X-ray measurements were conducted at the ALS 6.3.2 beamline to quantify the graded periods on concave and convex mirrors of the Schwarzschild objective. They demonstrated that the reflectivity curves were adjusted with the accuracy of about 0.008 nm (0.3%) over the entire mirror surfaces. The total throughput of the objective with full working aperture (N A ~ 0.2) is estimated to be as high as 0.25%.

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“…In these cases, Co/C and Ni/C, which form the sharpest interfaces, are the materials of choice [27]. The best performance at near-normal incidence has been achieved with Co/C multilayer optics showing a reflectance of 15% [28]. It should be noted that Co and Ni are the only materials that have a positive ΔΗ f when combined with C. investigated systems.…”

Section: Carbon Edgementioning

confidence: 99%

Modelling single shot damage thresholds of multilayer optics for high-intensity short-wavelength radiation sources

Loch¹,

Sobierajski²,

Louis³

et al. 2012

Opt. Express

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The single shot damage thresholds of multilayer optics for high-intensity short-wavelength radiation sources are theoretically investigated, using a model developed on the basis of experimental data obtained at the FLASH and LCLS free electron lasers. We compare the radiation hardness of commonly used multilayer optics and propose new material combinations selected for a high damage threshold. Our study demonstrates that the damage thresholds of multilayer optics can vary over a large range of incidence fluences and can be as high as several hundreds of mJ/cm(2). This strongly suggests that multilayer mirrors are serious candidates for damage resistant optics. Especially, multilayer optics based on Li(2)O spacers are very promising for use in current and future short-wavelength radiation sources.

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Carbon window soft x-ray imaging using multilayer optics

Cited by 12 publications

References 9 publications

Friction and Wear Characteristics of C/Si Bi-layer Coatings Deposited on Silicon Substrate by DC Magnetron Sputtering

Friction and Wear Characteristics of C/Si Bi-layer Coatings Deposited on Silicon Substrate by DC Magnetron Sputtering

Graded multilayer mirrors for the carbon window Schwarzschild objective

Modelling single shot damage thresholds of multilayer optics for high-intensity short-wavelength radiation sources

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