High temperature gas-cooled reactors have recently gained importance as a source of electricity and process heat. Nuclear fuel used in these reactors consists of TRISO (TRiple coated ISOtropic) coated particles, where spherical grains of UO2 or UC2 or UCO kernel are covered with four successive layers consisting of pyrolytic carbon and silicon carbide. Of great importance is the chemical purity of reagents and substances used for the production of TRISO coated fuel particles. Analytical techniques ensuring the determination of elements at trace levels are inductively coupled plasma mass spectrometry (ICP-MS) and neutron activation analysis (NAA). They were applied in this work for the chemical characterization of substrates used for TRISO fuel production. Two analytical procedures were developed: the first, where materials are analyzed using ICP-MS, and the second with the aid of NAA. Successive stages of these procedures are described with details. Results of quantitative chemical analysis of examined substances are reported as well as detection limits for the investigated elements. Moreover, the expanded uncertainties estimated for the determined elements while employing the devised analytical procedures are presented.