Cartridge-type piezostack deformable mirror with reduced cross-section of control elements

Abstract

The reduction of cross-sectional area of actuators from 4*4 mm2 to 2*2 mm2 in cartridge-type piezostack deformable mirror was investigated. Harmonic analysis showed that stroke of the actuators with 16 mm2 and 4 mm2 was equal 5.33 and 5.52 microns correspondingly in case of interdigital commutation of layers. However, the mechanical stiffness of such actuators was low. To increase robustness of wavefront corrector a gap structure for inner electrode configuration was used. The piezoceramic cartridges with cross-sectional area of individual actuator with 2*2 mm2 was produced. The local stroke of single piezostack was 4.6-4.8 microns per 300 V.