Case Study on the Practical Use of Wettable Filters in the Removal of Submicron Particles

Agranovski, Igor E.; Whitcombe, Joshua Matthew

doi:10.1002/1521-4125(200105)24:5<513::aid-ceat513>3.0.co;2-c

Cited by 12 publications

(9 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Those who have conducted work in this field, however, have typically considered the filtration of liquid and solid aerosols in succession [77], liquid coated particles [110] or mixtures of solid and liquid aerosols [40]. Alternatively, other studies have examined the possibility of irrigating filters capturing solid particles, in an attempt to avoid filter replacement [3,8].…”

Section: Colloid Aerosolsmentioning

confidence: 99%

Aerosol-mist coalescing filters – A review

Mead-Hunter

King

Mullins

2014

Separation and Purification Technology

111

View full text Add to dashboard Cite

Section: Colloid Aerosolsmentioning

confidence: 99%

Aerosol-mist coalescing filters – A review

Mead-Hunter

King

Mullins

2014

Separation and Purification Technology

111

View full text Add to dashboard Cite

“…The filters were selected as representatives of low, medium, and high efficiency types commonly used in industries such as those mentioned previously (Agranovski and Whitcombe 2001). The Scanning Electron Microscope (SEM) images show the structure of the filter, fiber orientation, and relative packing density.…”

Section: Filtersmentioning

confidence: 99%

“…These technologies are industrially applicable, as quantities of water for filter irrigation are more readily available and recyclable in industry than oils. A trial plant using such technology has been used for particulate removal in a steel pipe galvanizing plant with great success (Agranovski and Whitcombe 2001).…”

Section: Introductionmentioning

confidence: 99%

Particle Bounce During Filtration of Particles on Wet and Dry Filters

Mullins

Agranovski

Braddock

2003

Aerosol Science and Technology

View full text Add to dashboard Cite

This paper experimentally examines the bounce and immediate re-entrainment of liquid and solid monodisperse aerosols under a stable filtration regime (precake formation) by wet and dry fibrous filters. PSL and DEHS were the solid and liquid aerosols, respectively, used in four monodisperse sizes of 0.52, 0.83, 1.50, and 3.00 µm. Three different fibrous filters were used to filter the aerosol streams, and the efficiency of the filtration process for each aerosol type under dry and wet regimes was measured. It was found that the solid particles generally exhibited a lower fractional filtration efficiency than liquid particles, although this difference decreased in the smaller size fractions. The difference between solid and liquid efficiencies was found to be greatest in the 1.5 µm size range. As particle sizes of liquid/solid aerosols and filtration parameters were similar, this difference is most likely to be due to the effect of particle bounce and or immediate re-entrainment occurring inside the filter, with the greater efficiency of filtration of the liquid particles being due to their greater capacity to plastically/elastically deform in order to absorb the impact forces. However, for the wet filtration regime (each fibre of the filter was coated by a film of water), no significant difference in filtration efficiency was detectable between solid and liquid aerosols. Therefore, the conclusion can be drawn that the either the bounce effect of the particles is inhibited by the liquid film, or the filtration conditions in the wet filter are so different that the aerosol properties are less significant with respect to capture.

show abstract

“…Several alterations have been proposed to improve the performance of the scrubbers operating for different process vent streams. [7][8][9][10] However, there is no report available on the optimization studies/ method/design for enhancing the poor performances of the packed-bed operating in semiconductor factories. The study is targeted to modify the existing acid-and base-packed bed of a semiconductor manufacturing company to enhance the performance for high-volumetric flow rate, low-concentration acidic and basic gases.…”

Section: Introductionmentioning

confidence: 99%

Field Enhancements of Packed-Bed Performance for Low-Concentration Acidic and Basic-Waste Gases from Semiconductor Manufacturing Process

Chein

Aggarwal

et al. 2005

Journal of the Air & Waste Management Association

View full text Add to dashboard Cite

Low-concentration acidic and basic-waste gas pollutants contribute significantly in the total emission of a facility. Previous results show that the control of high volumetric flow rate (ϳ500 m 3 /min), low-concentration acidic (Ͻ1 ppm by vol) and basic (Ͻ3 ppm by vol) gases from semiconductor process vent, by conventional wet scrubbing technique is a challenging task. This work was targeted to enhance the performance of packed beds for high-volumetric flow rate, low-concentration acidic (HF, HCl), and basic (NH 3 )-waste gases from the semiconductor manufacturing process. The methodology used to meet the goal was the application of fine-water mist over the inlet stream before entering to the packed bed and use of the surfactant with mist/packed-bed liquid in low concentration. An experimental study was carried out in two acidpacked beds to optimize the operating conditions, such as pH of the liquid, circulating liquid flow rate, blow-down cycle, and so forth. The relationship among liquid pH, liquid ionic concentration, and the removal efficiency of the packed bed for the pollutants has been discussed considering chemical equilibrium, two-film theory, and Henry's law. For the potential utilization of scrubbing water, the dependency of the efficiency on blow-down cycle was studied, and a mechanism is suggested. The proposed water-mist surfactant system was installed in two acid-packed beds, and performance of the packed beds was compared. The background efficiencies of the acid-packed beds for HF, HCl, and NH 3 were found max to be (n ϭ 11) 53, 40, and 27%, whereas after installation of the system, they increased significantly and became 76 Ϯ 13% (n ϭ 10), 76 Ϯ 8% (n ϭ 7), and 78 Ϯ 7% (n ϭ 7), respectively, for inlet concentrations of HF and HCl Ͻ1 ppm and NH 3 Ͻ14 ppm. The mechanism by which the surfactants operate to enhance the removal in scrubbing process is suggested considering the hydrodynamic effect and the interfacial effect with the charge-generating characteristic of surfactants on water surface, when dissolved into water. The results show that a proposed rectification system can effectively reduce the emission rates below the regulatory level (0.6kg/hr) at the present conditions of the facility.

show abstract

Case Study on the Practical Use of Wettable Filters in the Removal of Submicron Particles

Cited by 12 publications

References 4 publications

Aerosol-mist coalescing filters – A review

Aerosol-mist coalescing filters – A review

Particle Bounce During Filtration of Particles on Wet and Dry Filters

Field Enhancements of Packed-Bed Performance for Low-Concentration Acidic and Basic-Waste Gases from Semiconductor Manufacturing Process

Contact Info

Product

Resources

About