Catalytic decomposition of phosphorus compounds to produce phosphorus atoms

Umemoto, Hironobu; Kanemitsu, Taijiro; Kuroda, Yoshimasu

doi:10.7567/jjap.53.05fm02

Cited by 11 publications

(11 citation statements)

References 25 publications

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“…Production Mechanism of BH 3 . The production mechanism of BH 3 from B 2 H 6 , reaction 1, is not clear.…”

Section: Resultsmentioning

confidence: 99%

“…The experimental procedure and apparatus were similar to those described elsewhere. − ,− Because B 2 H 6 is toxic and explosive, a safe gas handling system supplied by Tomoe Shokai Co. Ltd. was employed. B 2 H 6 diluted with He (or a mixture with H 2 ) was decomposed in a cylindrical chamber evacuated by a turbomolecular pump (Osaka Vacuum, TG220FCAB).…”

Section: Experimental Methodsmentioning

confidence: 99%

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Production of B Atoms and BH Radicals from B₂H₆/He/H₂ Mixtures Activated on Heated W Wires

Umemoto

Kanemitsu

Tanaka³

2014

J. Phys. Chem. A

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B atoms and BH radicals could be identified by laser-induced fluorescence when B2H6/He/H2 mixtures were activated on heated tungsten wires. The densities of these radical species increased not only with the wire temperature but also with the partial pressure of H2. The densities in the presence of 0.026 Pa of B2H6 and 2.6 Pa of H2 were on the order of 10(11) cm(-3) both for B and BH when the wire temperature was 2000 K. Densities in the absence of a H2 flow were much smaller, suggesting that the direct production of these species on wire surfaces is minor. B and BH must be produced in the H atom shifting reactions, BH(x) + H → BH(x-1) + H2 (x = 1-3), in the gas phase, while H atoms are produced from H2 on wire surfaces. The B atom density increased monotonously with the H atom density, while the BH density showed saturation. These tendencies could be reproduced by simple modeling based on ab initio potential energy calculations and the transition-state theoretical calculations of the rate constants. The absolute densities could also be reproduced within a factor of 2.5.

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“…Production Mechanism of BH 3 . The production mechanism of BH 3 from B 2 H 6 , reaction 1, is not clear.…”

Section: Resultsmentioning

confidence: 99%

Section: Experimental Methodsmentioning

confidence: 99%

Production of B Atoms and BH Radicals from B₂H₆/He/H₂ Mixtures Activated on Heated W Wires

Umemoto

Kanemitsu

Tanaka³

2014

J. Phys. Chem. A

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“…The experimental procedure and apparatus were similar to those described elsewhere [2,3,16,17,19]. B 2 H 6 diluted with He and H 2 (D 2 ) were introduced into a cylindrical chamber evacuated by a turbomolecular pump (Osaka Vacuum, TG220FCAB) through mass flow controllers (Horiba STEC, SEC-40M or SEC-7320M).…”

Section: Methodsmentioning

confidence: 99%

“…It has been demonstrated that the decomposition processes of SiH 4 , PH 3 , and P 4 are catalytic since wire material dependences have been observed [15][16][17]. Another technique is to examine the total pressure dependence of the decomposition efficiencies.…”

Section: Introductionmentioning

confidence: 99%

Decomposition processes of diborane and borazane (ammonia-borane complex) on hot wire surfaces

Umemoto

Miyata

2015

Thin Solid Films

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The decomposition efficiencies of B 2 H 6 and H 3 NBH 3 activated on hot wire surfaces were measured mass spectrometrically. The decomposition efficiency of B 2 H 6 increased with the residence time of gases in the chamber, and decreased with total pressure when He was added. Decomposition efficiency was still high even under collision-free conditions. These results suggest that the decomposition is not thermal 2 but catalytic, at least at low pressures, although the wire-material dependence of the decomposition efficiency was minor. The decomposition efficiency of H 3 NBH 3 vapor was higher than that of B 2 H 6 and increased with the addition of H 2. H 2 , NH 3 , and N 2 as well as H 2 NBH 2 were identified as stable decomposition products. These results indicate H 3 NBH 3 is a viable candidate as a safe dopant precursor for B-atom doping.

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“…Although W wires are not nitrided or phosphided, 13 carburization has been reported widely. [14][15][16][17][18] Winters et al have reported that C atoms are released from carburized W wires when heated in the absence of any buffer gases, while CH x (x1) species are not.…”

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confidence: 99%

A Clean Source of B atoms without Using Explosive Boron Compounds

Umemoto¹,

Miyata²

2016

Bulletin of the Chemical Society of Japan

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Efficient sustained-release of B atoms, sufficient for doping to semiconductor substrates, was achieved when W wires boronized by NH 3 BH 3 /H 2 were heated in the presence of H 2. The B-atom density in the gas phase was on the order of 10 11 cm-3 and could be kept constant more than 240 min. Matsumura and coworkers have shown that surface doping of B atoms can be carried out by exposing crystalline Si to the active species formed by the catalytic cracking of B 2 H 6 on hot W wire surfaces. 1,2 Such surface doping makes it possible to control the surface potential of crystalline Si, and consequently to reduce the surface recombination velocity of minority carriers. The problem is that B 2 H 6 is not only toxic, but also explosive. Recently, we have reported that NH 3 BH 3 ,

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Catalytic decomposition of phosphorus compounds to produce phosphorus atoms

Cited by 11 publications

References 25 publications

Production of B Atoms and BH Radicals from B₂H₆/He/H₂ Mixtures Activated on Heated W Wires

Production of B Atoms and BH Radicals from B₂H₆/He/H₂ Mixtures Activated on Heated W Wires

Decomposition processes of diborane and borazane (ammonia-borane complex) on hot wire surfaces

A Clean Source of B atoms without Using Explosive Boron Compounds

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Catalytic decomposition of phosphorus compounds to produce phosphorus atoms

Cited by 11 publications

References 25 publications

Production of B Atoms and BH Radicals from B2H6/He/H2 Mixtures Activated on Heated W Wires

Production of B Atoms and BH Radicals from B2H6/He/H2 Mixtures Activated on Heated W Wires

Decomposition processes of diborane and borazane (ammonia-borane complex) on hot wire surfaces

A Clean Source of B atoms without Using Explosive Boron Compounds

Contact Info

Product

Resources

About

Production of B Atoms and BH Radicals from B₂H₆/He/H₂ Mixtures Activated on Heated W Wires

Production of B Atoms and BH Radicals from B₂H₆/He/H₂ Mixtures Activated on Heated W Wires