Catalytic Disproportionation of Chlorosilanes Using Imidazolium Ionic Liquids Supported on Polymer Supports

Vorotyntsev, Andrey V.; Марков, А. Н.; Petukhov, Anton N.; Pryakhina, V. I.; Atlaskina, Maria E.; Atlaskin, Artem A.; Kapinos, Alexander A.; Воротынцев, В. М.

doi:10.1134/s2070050421010104

Cited by 5 publications

(2 citation statements)

References 14 publications

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“…Virtually all silane used in hydride technology is obtained by the catalytic dismutation reaction of trichlorosilane (TCS) [14,15]. In this reaction, in addition to silane, a sixteen-fold mass amount of silicon tetrachloride (STC) is obtained, which is subject to disposal.…”

Section: Introductionmentioning

confidence: 99%

Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction

Kornev,

Gornushkin,

Shabarova

et al. 2023

Sci

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The processes of hydrogen reduction of silicon and germanium chlorides under the conditions of high-frequency (40.68 MHz) counteracted arc discharge stabilized between two rod electrodes are investigated. The main gas-phase and solid products of plasma-chemical transformations are determined. Thermodynamic analysis of SiCl4 + H2 and GeCl4 + H2 systems for optimal process parameters was carried out. Using the example of hydrogen reduction of SiCl4 by the method of numerical modeling, gas-dynamic and thermal processes for this type of discharge are investigated. The impurity composition of gas-phase and solid reaction products is investigated. The possibility of single-stage production of high-purity Si and Ge mainly in the form of compact ingots, as well as high-purity chlorosilanes and trichlorogermane, is shown.

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Section: Introductionmentioning

confidence: 99%

Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction

Kornev,

Gornushkin,

Shabarova

et al. 2023

Sci

View full text Add to dashboard Cite

show abstract

“…Virtually all silane used in hydride technology is obtained by the catalytic disproportionation reaction of trichlorosilane (TCS) [14,15]. In this reaction, in addition to silane, a sixteen-fold mass amount of silicon tetrachloride is obtained, which is subject to disposal.…”

Section: Introductionmentioning

confidence: 99%

Features of Plasma-Chemical Hydrogen Reduction of Volatile Silicon and Germanium Chlorides in rf-arc Discharge

Kornev,

Gornushkin,

Shabarova

et al. 2023

Preprint

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The processes of hydrogen reduction of silicon and germanium chlorides under the conditions of radio-frequency (40.68 MHz) counteracted arc discharge stabilized between two rod electrodes were investigated. The main gas-phase and solid products of plasma-chemical transformations were determined. Thermodynamic analysis of SiCl4 + H2 and GeCl4 + H2 systems was carried out. It is shown that under the implemented experimental conditions, equilibrium components of the products are established. The detected spectra of chemical activity were studied, which gave reason to assume that the molecular mechanism of the hydrogen reduction process is the main one. The impurity composition of gas-phase and solid reaction products was investigated. The possibility of single-stage production of high-purity Si and Ge mainly in the form of compact ingots, as well as high-purity chlorosilanes and trichlorogermane, was shown.

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Homogeneous F riedel– C rafts Alkylation

Dasireddy¹,

Singh²,

Joseph³

et al. 2023

Industrial Arene Chemistry

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Catalytic Disproportionation of Chlorosilanes Using Imidazolium Ionic Liquids Supported on Polymer Supports

Cited by 5 publications

References 14 publications

Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction

Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction

Features of Plasma-Chemical Hydrogen Reduction of Volatile Silicon and Germanium Chlorides in rf-arc Discharge

Homogeneous F riedel– C rafts Alkylation

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