We used cathodoluminescence (CL)
spectroscopy to characterize the
oxygen vacancies (V
O
) in ceria (CeO
2
). The effects
of the processing atmosphere and thermal quenching temperature on
the nature and distribution of the intrinsic defects and on the spectroscopic
behavior were investigated. The presence of polarons and associates
of the polarons with the oxygen vacancies such as (V
O
••
–Ce
Ce
′
)
•
is demonstrated. CL intensity quenching above a critical concentration
of V
O
has been shown. Even though the emission centers
in all samples are the same, their concentration changes with the
oxygen partial pressure of the processing atmosphere. Deconvolution
of the observed CL spectra shows that the emissions originating from
the F
0
centers prevail over those of F
+
centers
of V
O
when the defect concentration is high.