Cathodoluminescence study of a silicon dioxide layer on silicon with the aid of Auger electron spectroscopy

Koyama, Hiroshi; Matsubara, K.; Mouri, Masashi

doi:10.1063/1.323546

Cited by 19 publications

(3 citation statements)

References 8 publications

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“…Despite numerous studies, the origin of the cathodoluminescence colours in e-quartz is still not resolved. The phenomenon has been attributed to the presence of trace elements (Claffy and Ginther, 1959;Pott and McNicol, 1971;Mitchell and Denure, 1973;Sprunt, 1981), to lattice ordering (Zinkernagel, 1978), to the occurrence of defect centres (Sippel, 1971;Mitchell and Denure, 1973;Jones and Embree, 1976;Koyama et al, 1977;Gee and Kastner, 1980) or to an intrinsic property of the SiO 4 tetrahedron (Hanusiak and White, 1975;Trukhin and Plaudis, 1979). The trace amounts of elements (other than silica and oxygen) incorporated in a-quartz, as well as the chargecompensating exchange of silica by aluminium or iron with hydrogen, lithium, sodium or potassium, and the additional lack of oxygen, are the main reasons for the difficulty in determining the origin of a-quartz luminescence.…”

Section: Origin Of Luminescence Colours In U-quartzmentioning

confidence: 99%

Cathodoluminescence Colours of α-Quartz

et al. 1988

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A new cathodoluminescence-microscope has been developed with a considerably improved detection limit. Time-dependent luminescence intensity changes observed during electron bombardment enabled the recognition of short-lived, long-lived, and brown luminescence colour types in ~-quartz.Short-rived bottle-green or blue luminescence colours with zones of non-luminescing bands are very common in authigenic quartz overgrowths, fracture fillings or idiomorphic vein crystals. Dark brown, short-lived yellow or pink colours are often found in quartz replacing sulphate minerals. Quartz from tectonically active regions commonly exhibits a brown luminescence colour. A red luminescence colour is typical for quartz crystallized close to a volcanic dyke or sill.The causes of these different and previously poorly understood luminescence colours were investigated using heat treatment, electron bombardment and electrodiffusion. Both natural and induced brown luminescence colours reflect the presence of lattice defects (nonbonding Si-O) due to twinning, mechanical deformation, particle bombardment or extremely rapid growth. The bottle-green and blue linearly polarized luminescence colour, characterized by a plane of polarization parallel to the c-axis, both depend on the presence of interstitial cations. The yellow and red luminescence colours in ~-quartz both exhibit a plane of polarization perpendicular to the c-axis and appear to be related to the presence of trace elements in an oxidizing solution and to ferric iron respectively.

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Section: Origin Of Luminescence Colours In U-quartzmentioning

confidence: 99%

Cathodoluminescence Colours of α-Quartz

et al. 1988

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“…Cathodoluminescence (CL) spectral analysis has been employed to characterize the defects in SiO 2 film on Si and to study the effects of ionizing radiation on the SiO 2 -Si structure. The CL spectra can reveal the physical information of defects that correspond to specific CL peaks [1][2][3]. In addition, the CL spectra can also provide some supplementary information about irradiation-induced effects on SiO 2 -Si structures by correlating the luminescence centres against these effects [4].…”

Section: Introductionmentioning

confidence: 99%

The properties of 2.7 eV cathodoluminescence from SiO₂film on Si substrate

Liu

Phang

Chan

et al. 1999

J. Phys. D: Appl. Phys.

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Cathodoluminescence (CL) spectra from a silicon dioxide (SiO2) film on silicon (Si) substrate were studied. The temperature-dependent results of the 2.7 eV peak suggest that the quantum efficiency increases but the build-up of electron-beam-irradiation-induced luminescence centres decreases upon specimen cooling. The voltage-dependent behaviour of the 2.7 eV peak does not show any luminescence enhancement from the SiO2-Si interface.

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“…Koyama et al [7] reported cathodoluminescence results of Si02 on Si by the aid of Auger electron spectroscopy. They proposed that bands at 2800 A and 5300 A may be due to trivalent Si, while the 4500 A band may be surface contaminations.…”

Section: Discussionmentioning

confidence: 99%

Long Lifetime of Bulk Luminescence Observed in Spectrosil Glasses Under Electron Bombardment

Wang

Haglund

Hudson

et al. 1988

Desorption Induced by Electronic Transitions DIET III

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We have observed four bulk luminescence peaks from Spectrosil glasses stimulated by low energy electron bombardment in ultra-high vacuum. The lifetimes of these bands were measured by chopping the incident electron beam and measuring the fluorescence decay. It was found that one of them has a markedly long lifetime (2.1 ms) compared with the others «l0J.1s). After annealing at 500 0 C for one hour and pumping down overnight, characteristic spectral lines from OH*, H*, K*, a molecular band, and an unidentified line appeared at room temperature during electron irradiation. A possible mechanism for this long-lifetime luminescence will be discussed.

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Cathodoluminescence study of a silicon dioxide layer on silicon with the aid of Auger electron spectroscopy

Cited by 19 publications

References 8 publications

Cathodoluminescence Colours of α-Quartz

Cathodoluminescence Colours of α-Quartz

The properties of 2.7 eV cathodoluminescence from SiO₂film on Si substrate

Long Lifetime of Bulk Luminescence Observed in Spectrosil Glasses Under Electron Bombardment

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Cathodoluminescence study of a silicon dioxide layer on silicon with the aid of Auger electron spectroscopy

Cited by 19 publications

References 8 publications

Cathodoluminescence Colours of α-Quartz

Cathodoluminescence Colours of α-Quartz

The properties of 2.7 eV cathodoluminescence from SiO2film on Si substrate

Long Lifetime of Bulk Luminescence Observed in Spectrosil Glasses Under Electron Bombardment

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Product

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The properties of 2.7 eV cathodoluminescence from SiO₂film on Si substrate