The structure and properties of CeO 2 surfaces have been intensively studied due to their importance in a lot of surface-related applications. Since most of surface techniques probe the structure information inside the outermost surface plane, the subsurface structure information has been elusive in many studies. Using the profile imaging with aberration-corrected transmission electron microscopy, the structure information in both the outermost layer and the sublayers of the CeO 2 (100) surface has been obtained. In addition to the normal structures that have been reported before, where the surface is Ce-or O-terminated, a metastable surface has been discovered. In the new structure, there is an atomic layer reversal between the outermost layer and the sublayer, giving a structure with O as the outermost layer for the stoichiometry of normal Ce-terminated surface. The charge redistribution for the polarity compensation has also been changed relative to the normal surface.Keywords: surface structure, ceria, atomic layer reversal, aberration-corrected TEM, first-principles calculations Materials based on CeO 2 , owing to their outstanding physical and chemical properties, have played important roles in solar cells [1], solid-oxide fuel cells [2,3], UV blockers [4-6] and a variety of catalytic reactions like three-way automotive catalytic converters, the production and purification of hydrogen [7][8][9][10]. Many of these applications are closely related to the specific local structures on CeO 2 surface such as islands, steps, oxygen vacancies and Ce 3+ ions. For instance, the high capacity of CeO 2 in oxygen storage-release is largely contributed by the oxygen vacancies that can be quickly formed and eliminated [11]; the abundant oxygen vacancies in Ru/CeO 2 catalysts serve as the active site for CO 2 activation [12] and also behave as the active sites for many catalytic reactions with the accompanied reduction of Ce 4+ ions [13]; the high activity of Au/ceria catalysts in the water-gas shift reaction has been traced back to the ionic Au species that only strongly associated with cerium-oxygen surface [14,15]. Hence, CeO 2 surfaces have been attracting large amount of investigation. In previous studies on the surface of CeO 2 , single crystals were usually chosen as the main research objects. Scanning tunneling microscope (STM) and atomic force microscope (AFM) were commonly used in structural characterization [16][17][18]. Most of research findings are focused on the (111) surface of ceria single crystals or epitaxial thin films. Namai et al. [16,17] observed the structure and dynamic behavior of CeO 2 (111) surfaces in STM, and visualized the surface oxygen atoms, oxygen point defects, and multiple oxygen defects on oxygenterminated CeO 2 (111) surface through noncontact AFM. Esch et al. [18] unraveled the local structure of oxygen vacancies on the (111) surface and subsurface combining high resolution STM with density functional calculations. They found that the electrons left behind by released oxyge...