“…Each film was spin coated for 30 s at 1000, 1500, 2000, and 2150 rpm under 15% relative humidity for each M:T condition of 1.2, 1.8, 2.4, and 3.0, respectively, as described in detail elsewhere. [ 61,63,94 ] Immediately after the end of spin coating, each sample was removed from the humidity‐controlled chamber and placed on a 110 °C hot plate overnight to crosslink the oxide, termed as “aging.” The room humidity during aging was not found to have an effect. Aging conditions were optimized to prevent initial dewetting and to assure sufficient oxide connectivity to survive calcination.…”