CCD-based parallel detection system for electron energy-loss spectroscopy and imaging

Strauss, M.; Náday, I.; Sherman, I. S.; Zaluzec, Nestor J.

doi:10.1016/0304-3991(87)90055-6

Cited by 35 publications

(11 citation statements)

References 5 publications

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“…Of these two, the photodiode arrays are easier to use for EELS, since they are available with an aperture size (width of the active area) as large as 2.5 mm, making them less sensitive to changes in horizontal position or width of the incident beam (Craven & Scott, 1986). As an alternative, a two-dimensional CCD array can be employed, given suitable readout circuitry which combines the output of many rows of diodes (Strauss et al 1987).…”

Section: Choice O F Parallel-recording Detectormentioning

confidence: 99%

A compact parallel‐recording detector for EELS

Egerton

Crozier

1987

Journal of Microscopy

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SUMMARY We designed and constructed the prototype of a parallel‐recording system for a Gatan 607 electron energy‐loss spectrometer attached to a conventional transmission electron microscope. Quadrupole lenses were used to project a magnified energy‐loss spectrum onto a 65 μm thick screen of single‐crystal yttrium aluminium garnet (YAG), where the electrons are converted to photons which are transferred by coherent fibre optics to a 1024‐channel photodiode array. When used in conjunction with a tungsten‐filament electron source, the system achieves an energy resolution close to 2eV and can record inner‐shell ionization edges with good signal/noise ratio in exposure times not exceeding 5 s.

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Section: Choice O F Parallel-recording Detectormentioning

confidence: 99%

A compact parallel‐recording detector for EELS

Egerton

Crozier

1987

Journal of Microscopy

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“…Spectroscopy is utilized in various research fields such as physics, chemistry, agriculture, and medical science, and delivers valuable insights and knowledge. Spectroscopic data based on light, X-ray and electrons is often obtained using charge coupled device (CCD) detectors [1][2][3][4] , and their resolution is sometimes limited by the number of pixel arrays in the CCD detectors. In Raman spectroscopy, for example, peak positions are slightly shifted depending on the temperature, carrier concentration and strain in semiconductors and low-dimensional materials [5][6][7][8][9][10][11][12][13][14] .…”

Section: Introductionmentioning

confidence: 99%

Bayesian Super-Resolution of Spectroscopic Data

Tsujimori

Hirotani

Harada

2021

Preprint

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The resolution of spectroscopy, which delivers valuable insights and knowledge in various research fields, has sometimes been limited by the number of multi-channel detectors employed. For example, in Raman spectroscopy using charge coupled device (CCD) detectors, the resolution is limited by the number of the CCD arrays and it is difficult to achieve spectroscopic data acquisition with high resolution over a wide range. Here we describe a methodology to increase the resolution as well as signal-to-noise (S/N) ratio by applying Bayesian super-resolution in the analysis of spectroscopic data. In our present method, first the hyperparameters for the Bayesian super-resolution are determined by a virtual experiment imitating actual experimental data, and the precision of the super-resolution reconstruction is confirmed by the calculation of errors from the ideal values. For validation of the super-resolution of spectroscopic data, we applied this method to the analysis of Raman spectra. From 200 Raman spectra of a reference Si substrate with a resolution of about 0.8 cm-1, super-resolution reconstruction with resolution of 0.01 cm-1 was successfully achieved with the promised precision. From the super-resolution spectrum, the Raman scattering peak of the reference Si substrate was estimated as 520.55 (+0.12, -0.09) cm-1, which is comparable to the precisely determined value from previous works. The present methodology can be applied to various kinds of spectroscopic analysis, leading to increased precision in the analysis of spectroscopic data and the ability to detect slight differences in spectral peak positions and shapes.

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“…Spherical aberration corrected electron probes greatly enhance spatial resolution and probe current density 9 , allowing almost routine atomic-scale chemical and oxidation state mapping 10 , 11 . The electron sensors used for EELS have also evolved, with large improvements in speed, resolution, and noise achieved since CCD-based parallel-EELS became the industry standard 12 , 13 . However, these advancements of the electron sensor have occurred incrementally, and detector design has not significantly changed in several decades.…”

Section: Introductionmentioning

confidence: 99%

Direct Detection Electron Energy-Loss Spectroscopy: A Method to Push the Limits of Resolution and Sensitivity

Hart

Lang

Leff

et al. 2017

Sci Rep

125

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In many cases, electron counting with direct detection sensors offers improved resolution, lower noise, and higher pixel density compared to conventional, indirect detection sensors for electron microscopy applications. Direct detection technology has previously been utilized, with great success, for imaging and diffraction, but potential advantages for spectroscopy remain unexplored. Here we compare the performance of a direct detection sensor operated in counting mode and an indirect detection sensor (scintillator/fiber-optic/CCD) for electron energy-loss spectroscopy. Clear improvements in measured detective quantum efficiency and combined energy resolution/energy field-of-view are offered by counting mode direct detection, showing promise for efficient spectrum imaging, low-dose mapping of beam-sensitive specimens, trace element analysis, and time-resolved spectroscopy. Despite the limited counting rate imposed by the readout electronics, we show that both core-loss and low-loss spectral acquisition are practical. These developments will benefit biologists, chemists, physicists, and materials scientists alike.

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CCD-based parallel detection system for electron energy-loss spectroscopy and imaging

Cited by 35 publications

References 5 publications

A compact parallel‐recording detector for EELS

A compact parallel‐recording detector for EELS

Bayesian Super-Resolution of Spectroscopic Data

Direct Detection Electron Energy-Loss Spectroscopy: A Method to Push the Limits of Resolution and Sensitivity

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