Nd 2 CuO 4 and La 2 CuO 4 are potential candidates as cathode material for intermediate temperature-solid oxide fuel cells. Nd-Cu and La-Cu oxides were cosputtered on rotating substrates from metallic La, Nd and Cu targets in the presence of a reactive argon-oxygen gas mixture. Structural and chemical features of these films have been determined by X-ray diffraction and energydispersive spectroscopy. Their electrical resistivity was measured using the four-point probe method. As-deposited Nd-Cu based coatings are amorphous and, after annealing, crystallise in K 2 NiF 4+δ -type structure for Nd/Cu atomic ratio of 2, with more or less Nd 2 O 3 or CuO, depending on whether Nd or Cu is in excess, respectively. As-deposited La-Cu based coatings are also amorphous and crystallise in La 2 CuO 4 for La/Cu >2 or in LaCuO 3±δ perovskite-type structure when Cu is in excess. The electrical measurements show a clear relation between resistivity and structure of the coatings. After annealing, crystallised neodymium-based coatings show higher resistivity than lanthanum-based ones. Finally, LaCuO 3±δ exhibit higher resistivity than La 2 CuO 4 .