2022 International Conference on Electronics, Information, and Communication (ICEIC) 2022
DOI: 10.1109/iceic54506.2022.9748545
|View full text |Cite
|
Sign up to set email alerts
|

Cell Operation Technologies to Overcome Scale-down Issues in 3D NAND Flash Memory

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
4
0

Year Published

2022
2022
2024
2024

Publication Types

Select...
4
1

Relationship

0
5

Authors

Journals

citations
Cited by 5 publications
(4 citation statements)
references
References 14 publications
0
4
0
Order By: Relevance
“…Furthermore, high aspect-ratio hole etching reduces the hole radius toward the lower WL and strengthens the electric field applied to the gate dielectric [57]. This increases the program speed of the lower WL, but further deteriorates WL-to-WL interference when the aggressor cell becomes the lower WL [58]. To improve this phenomenon, instead of programming from lower WL to upper WL, performing programming from upper WL to lower WL can greatly relieve the cell-to-cell interference between WLs [59].…”
Section: Cell Variation Improvementmentioning
confidence: 99%
See 1 more Smart Citation
“…Furthermore, high aspect-ratio hole etching reduces the hole radius toward the lower WL and strengthens the electric field applied to the gate dielectric [57]. This increases the program speed of the lower WL, but further deteriorates WL-to-WL interference when the aggressor cell becomes the lower WL [58]. To improve this phenomenon, instead of programming from lower WL to upper WL, performing programming from upper WL to lower WL can greatly relieve the cell-to-cell interference between WLs [59].…”
Section: Cell Variation Improvementmentioning
confidence: 99%
“…To improve the above problem, W. Kim et al proposed a read level adjustment method according to WLn + 1 Pattern [58], as shown in Figure 11. First, to broadly classify WLn + 1 pattern into two types, a pre-sensing operation is performed on WLn + 1.…”
Section: The Wl Pitch Scalingmentioning
confidence: 99%
“…Although 3D process technology successfully enabled us to break through the scalingdown limit of conventional 2D planar NAND flash memory, 3D VNAND flash memory has encountered new challenges due to its unique 3D architecture and new flash cell structure [10][11][12][13][14][15][16][17][18][19]. For example, due to the three-dimensional (like cubic structure) block…”
Section: Introductionmentioning
confidence: 99%
“…The 2D planar NAND flash memory stores charges in a conductor called the floating gate, whereas the 3D VNAND flash memory stores bit information in a non-conductive (i.e., dielectric) layer within a CT-type cell called the SiN trap layer. The different cell structure of 3D VNAND flash memory causes new reliability issues such as early charge loss [15,17,18] or lateral charge spreading [13,14,19], which did not need to be considered in 2D planar NAND flash memory (more details are described in Section 2).…”
Section: Introductionmentioning
confidence: 99%