demanded in the area of biology and medicine because cellular functions are concerned with intracellular temperature. Also, dielectrophoresis impedance measurement method has recently attracted attention because the method is simple and immediately. In prior studies, it has been considered to change the impedance between electrodes due to the short-circuiting by pearl chain between electrodes [1], [2]. In this paper, we inspect impedance measurement by thermal changes under various situations and demonstrated that the impedance changes by heating even without short-circuiting by pearl chain.