Central composite designs coupled with simulation techniques for optimizing RIE process

Leksakul, Komgrit; Limcharoen, Alonggot

doi:10.1007/s00170-013-5374-2

Cited by 4 publications

(2 citation statements)

References 17 publications

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“…The most popular response surface design is the central composite design. It is useful for building a second-order model for the response variable without needing to use a complete three-level factorial experiment (Leksakul and Limcharoen, 2014). It combines a two-level fractional factorial and two other kinds of points (Lin et al, 2012):…”

Section: Central Composite Design (Ccd)mentioning

confidence: 99%

A New Approach for Solving Bi-Objective Redundancy Allocation Problem Using DOE, Simulation and <italic>ε</italic>-Constraint Method

Ghorabaee¹,

Amiri²,

Turskis³

2017

Informatica

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The redundancy allocation problem (RAP) has been studied for many different system structures, objective functions, and distribution assumptions. In this paper, we present a problem formulation and a solution methodology to maximize the system steady-state availability and minimize the system cost for the repairable series-parallel system designs. In the proposed approach, the components' time-to-failure (TTF) and time-to-repair (TTR) can follow any distribution such as the Gamma, Normal, Weibull, etc. We estimate an approximation of the steady-state availability of each subsystem in the series-parallel system with an individual meta-model. Design of experiment (DOE), simulation and the stepwise regression are used to build these meta-models. Face centred design, which is a type of central composite design is used to design experiments. According to a max-min approach, obtained meta-models are utilized for modelling the problem alongside the cost function of the system. We use the augmented ε-constraint method to reformulate the problem and solve the model. An illustrative example which uses the Gamma distribution for TTF and TTR is explained to represent the performance of the proposed approach. The results of the example show that the proposed approach has a good performance to obtain Pareto (near-Pareto) optimal solutions (system configurations).

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Section: Central Composite Design (Ccd)mentioning

confidence: 99%

A New Approach for Solving Bi-Objective Redundancy Allocation Problem Using DOE, Simulation and <italic>ε</italic>-Constraint Method

Ghorabaee¹,

Amiri²,

Turskis³

2017

Informatica

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show abstract

“…The result showed that surface roughness could minimize to 0.589 um. Leksakul [7] applied a central composite design (CCD) to find the optimal etching condition of a reactive ion etching (RIE) machine. The results showed that wall angel and depth were closed to the target.…”

Section: Introductionmentioning

confidence: 99%

Determination of Bore Grinding Machine Parameters to Reduce Cycle Time

Buddhachakara

Tharmmaphornphilas

2014

AMR

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This paper applies a central composite design (CCD) to determine proper machine parameters to reduce the cycle time of a bore grinding process. There are 6 machine parameters, which are rough grinding 2 starting position, fine grinding starting position, speed of rough grinding 1, speed of rough grinding 2, speed of rough grinding 3 and speed of fine grinding and 2 types of responses, which are cycle time and surface roughness considered in this study. A half CCD is used to find the optimal machine setup parameters. The experiment shows that new machine conditions can reduce cycle time from 2.98 second per piece to 2.76 second per piece and control surface roughness within specification of 1.0 um. After implementing the new machine conditions in the real setting, we found that the average actual cycle time is 2.76 second per piece with roughness of 0.841 um.

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Optimization of plasma surface modification parameter for fabricating a hot embossing mold with high surface finish

Kuo

Wang

2017

Int J Adv Manuf Technol

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Central composite designs coupled with simulation techniques for optimizing RIE process

Cited by 4 publications

References 17 publications

A New Approach for Solving Bi-Objective Redundancy Allocation Problem Using DOE, Simulation and <italic>ε</italic>-Constraint Method

A New Approach for Solving Bi-Objective Redundancy Allocation Problem Using DOE, Simulation and <italic>ε</italic>-Constraint Method

Determination of Bore Grinding Machine Parameters to Reduce Cycle Time

Optimization of plasma surface modification parameter for fabricating a hot embossing mold with high surface finish

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