Studies of electron energy loss spectroscopy and selected area electron diffraction ͑SAED͒ were systematically performed on 15 and 25 at. % lanthanide ͑Ln͒-doped ceria samples ͑Ln= Sm, Gd, Dy, and Yb͒, through which the local ordering of oxygen vacancies that develops with increase in doping level was confirmed in the sequence of ͑Gd, Sm͒ Ͼ DyϾ Yb. Furthermore, a monotone correlation between the development of the ordering and the degradation of ionic conductivity with increasing the doping concentration from 15 to 25 at. % was observed. Based on the analysis of SAED patterns, a structural model for the ordering of oxygen vacancies has been constructed, in which the arrangement of oxygen vacancies is similar to that in C-type Ln 2 O 3 oxides and the 1 2 ͗110͘ pairs of the vacancies are preferred. Then, the factors that can influence the formation of the ordering are discussed.