2012 Design, Automation &Amp; Test in Europe Conference &Amp; Exhibition (DATE) 2012
DOI: 10.1109/date.2012.6176689
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Challenges and emerging solutions in testing TSV-based 2 1 over 2D- and 3D-stacked ICs

Abstract: Through-Silicon Vias (TSVs) provide high-density, low-latency, and low-power vertical interconnects through a thinned-down wafer substrate, thereby enabling the creation of 2.5D-and 3D-Stacked ICs. In 2.5D-SICs, multiple dies are stacked side-by-side on top of a passive silicon interposer base containing TSVs. 3D-SICs are towers of vertically stacked active dies, in which the vertical inter-die interconnects contain TSVs. Both 2.5D-and 3D-SICs are fraught with test challenges, for which solutions are only emer… Show more

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Cited by 45 publications
(24 citation statements)
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“…Despite many challenges, the three-dimensional integrated circuit (3D IC) is a hot topic in semiconductor industry these days [2], [6], [8]. To achieve higher levels of integration, multiple layers of active electronic component are stacked vertically in a 3D IC.…”
Section: Introductionmentioning
confidence: 99%
“…Despite many challenges, the three-dimensional integrated circuit (3D IC) is a hot topic in semiconductor industry these days [2], [6], [8]. To achieve higher levels of integration, multiple layers of active electronic component are stacked vertically in a 3D IC.…”
Section: Introductionmentioning
confidence: 99%
“…Test challenges for 3D-SICs are discussed in [Marinissen12a,Noia11]. The need for standards like IEEE P1838 is discussed.…”
Section: Related Work 29mentioning
confidence: 99%
“…Solutions include contactless test [109] or inserting additional probing pads to non-bottom dies at the cost of increased area [110]. Another concern is whether to perform the test before or after wafer thinning [111]. Running tests before wafer thinning excludes defects due to thinning.…”
Section: Pre-bond Testingmentioning
confidence: 99%
“…Final testing, on the other hand, is the last quality screening step prior to shipping the product to customers; any part of the 3D chip should remain testable here [111].…”
Section: Mid-bond Post-bond and Final Testingmentioning
confidence: 99%