2020
DOI: 10.3390/ma13225279
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Challenges in a Hybrid Fabrication Process to Generate Metallic Polarization Elements with Sub-Wavelength Dimensions

Abstract: We report on the challenges in a hybrid sub-micrometer fabrication process while using three dimensional femtosecond direct laser writing and electroplating. With this hybrid subtractive and additive fabrication process, it is possible to generate metallic polarization elements with sub-wavelength dimensions of less than 400 nm in the cladding area. We show approaches for improving the adhesion of freestanding photoresist pillars as well as of the metallic cladding area, and we also demonstrate the avoidance o… Show more

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Cited by 3 publications
(2 citation statements)
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“…A detailed fabrication of the hollow waveguide array is provided by the authors in Ref. [34]. To facilitate a thorough understanding of the fabrication process, reference is made to this publication.…”
Section: Fabrication Of the Hollow Waveguide Arraymentioning
confidence: 99%
See 1 more Smart Citation
“…A detailed fabrication of the hollow waveguide array is provided by the authors in Ref. [34]. To facilitate a thorough understanding of the fabrication process, reference is made to this publication.…”
Section: Fabrication Of the Hollow Waveguide Arraymentioning
confidence: 99%
“…To facilitate a thorough understanding of the fabrication process, reference is made to this publication. The spatially variant polarimeter fabricated here differs from the production described in [34] in one aspect: the hollow waveguides are not horizontally arranged, but are tilted at various angles relative to the horizontal plane. The corresponding angles and related dimensions of the waveguides are presented in Table 1.…”
Section: Fabrication Of the Hollow Waveguide Arraymentioning
confidence: 99%