2005
DOI: 10.1016/j.diamond.2005.01.020
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Characterisation of a-C:H and oxygen-containing Si:C:H films by Raman spectroscopy and XPS

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Cited by 63 publications
(36 citation statements)
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“…FT-IR suggests that the dominant form of Si in the film is as a Si-O network with a smaller fraction coming from Si-C bonds thus affecting the coatings microstructure [15]. This trend was also identified by Veres et al [16], in that the presence of oxygen decreased the amount of Si in the carbon matrix.…”
Section: Si-dlc In the Literaturesupporting
confidence: 60%
See 1 more Smart Citation
“…FT-IR suggests that the dominant form of Si in the film is as a Si-O network with a smaller fraction coming from Si-C bonds thus affecting the coatings microstructure [15]. This trend was also identified by Veres et al [16], in that the presence of oxygen decreased the amount of Si in the carbon matrix.…”
Section: Si-dlc In the Literaturesupporting
confidence: 60%
“…Reported literature precedents for C1s calibrations for various DLC and Si-DLC samples were in agreement on the calibration reference value of 284.4 eV for the main peak. [16,19]. Evaluation of Si2p position and oxygen components were also verified from literature values [16,[20][21][22].…”
Section: Surface Analysismentioning
confidence: 98%
“…XPS spectra were calibrated using the main C1s peak component, which is well characterised in the literature. Works in the literature specify spectra of DLC films should be calibrated to the hydrocarbon (CHx) peak at 284.4 eV (19)(20)(21)(22). Calibration shifted the spectrum by 1.2 eV, correcting for charging issues.…”
Section: X-ray Photoelectron Spectroscopy (Xps)mentioning
confidence: 99%
“…These precursors might be gaseous (Silane -(SiH4) and oxygen (O2) mix) [44] , tetra methyle silane-TMS ((CH3)3SiH and oxygen mix) [45] or liquids Hexamethyle disiloxane HMDSO (C6H18OSi2) [46][47][48][49][50][51] , or tetraethoxysilane (TEOS, (C2H5O)4Si [52] , or tetraethylorthosilicate-TEOS (SiC8H20O4) [53,54,21] , hexa methyle disilane-HMDS (C6H18Si2) [55] and mixed siloxane and silazane precursors.…”
Section: Precursorsmentioning
confidence: 99%