Characterisation of AlN nano thin films prepared by PLD

Hua, Tongshu; Zhu, Bo; Song, Renguo

doi:10.1080/02670844.2018.1564476

Cited by 6 publications

(2 citation statements)

References 18 publications

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“…After the wear test, the diffraction peaks, corresponding to TaO Ta 2 O 5 and MgO, are The tribological properties of films are affected by microhardness, composition, phase and anti-plastic deformation ability, etc. [22,23]. The films, which have a higher microhardness, would have a better tribological property.…”

Section: Tribological Propertiesmentioning

confidence: 99%

Microstructural, mechanical, oxidation resistance and tribological properties of TaMgN films

Ding

Zuo

et al. 2022

Surface Engineering

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A series of composite TaMgN films with various Mg content were deposited using reactive magnetron sputtering. The microstructural, mechanical, oxidation resistance and tribological properties of the films were measured. The results showed that when the Mg content is between 0 and 11.9 at.-%, the films are composed of fcc-(Ta,Mg)N and hcp-(Ta,Mg)N phases. While the further increase of Mg content induced the appearance of hcp-Mg phase and the films consisted of fcc-(Ta, Mg)N, hcp-(Ta, Mg)N and hcp-Mg, the hardness of the thin films was first increased and then decreased with the increase of Mg content due to the combined action of solution strengthening, internal stress and phase composition. The highest hardness value is 33 GPa, (Mg content is 11.9 at.-%). With a further increase of Mg content, the average friction coefficient further increased gradually, while the wear rate first decreased and then increased.

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Section: Tribological Propertiesmentioning

confidence: 99%

Microstructural, mechanical, oxidation resistance and tribological properties of TaMgN films

Ding

Zuo

et al. 2022

Surface Engineering

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“…We mention that high-quality AlN (002) films were synthesized by PLD on (La,Sr)(Al,Ta)O 3 substrates [53]. According to [54], higher laser fluence and substrate temperature and lower ambient pressure are beneficial for PLD synthesis of AlN thin films with the (002) orientation.…”

Section: Tem Observationsmentioning

confidence: 99%

Pulsed Laser Deposition of Aluminum Nitride Films: Correlation between Mechanical, Optical, and Structural Properties

et al. 2019

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Aluminum nitride (AlN) films were synthesized onto Si(100) substrates by pulsed laser deposition (PLD) in vacuum or nitrogen, at 0.1, 1, 5, or 10 Pa, and substrate temperatures ranging from RT to 800 °C. The laser parameters were set at: incident laser fluence of 3–10 J/cm2 and laser pulse repetition frequency of 3, 10, or 40 Hz, respectively. The films’ hardness was investigated by depth-sensing nanoindentation. The optical properties were studied by FTIR spectroscopy and UV-near IR ellipsometry. Hardness values within the range of 22–30 GPa and Young’s modulus values of 230–280 GPa have been inferred. These values were determined by the AlN film structure that consisted of nanocrystallite grains, strongly dependent on the deposition parameters. The values of optical constants, superior to amorphous AlN, support the presence of crystallites in the amorphous film matrix. They were visualized by TEM and evidenced by FTIR spectroscopy. The characteristic Reststrahlen band of the h-AlN lattice with component lines arising from IR active phonon vibrational modes in AlN nanocrystallites was well detectable within the spectral range of 950–500 cm−1. Control X-ray diffraction and atomic force microscopy data were introduced and discussed. All measurements delivered congruent results and have clearly shown a correlation between the films’ structure and the mechanical and optical properties dependent on the experimental conditions.

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Impact of Various Input Parameters on the Preparation of Different AlN Nanostructures by Hybrid Route of Hydrothermal and Carbothermal Reduction Nitridation Technique

Sakthisabarimoorthi,

Lee,

Ryu

et al. 2024

Korean J. Chem. Eng.

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Characterisation of AlN nano thin films prepared by PLD

Cited by 6 publications

References 18 publications

Microstructural, mechanical, oxidation resistance and tribological properties of TaMgN films

Microstructural, mechanical, oxidation resistance and tribological properties of TaMgN films

Pulsed Laser Deposition of Aluminum Nitride Films: Correlation between Mechanical, Optical, and Structural Properties

Impact of Various Input Parameters on the Preparation of Different AlN Nanostructures by Hybrid Route of Hydrothermal and Carbothermal Reduction Nitridation Technique

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