Abstract:The microstructure of ceramic multilayered coatings deposited using TiN and TiB 2 targets has been investigated using HRTEM, EELS mapping and XRD. The coatings predominantly consist of nanocrystalline layers of alternating TiN and TiB, the latter being deposited nonstoichiometrically from the TiB 2 target as TiB.B27. Deposition of regions which are highly deficient in boron results in the coherent growth of large columnar TiN grains through many multilayer periods.
IntroductionImprovements to the lifetimes of … Show more
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