Characteristics of a hybrid radio frequency capacitively and inductively coupled plasma using hydrogen gas
Yasunori Ohtsu,
Tatsuo Tabaru,
Julian Schulze
Abstract:A hybrid combination of a radio frequency (RF) capacitively coupled plasma (CCP) equipped with a ring-shaped hollow powered electrode and an inductively coupled plasma (ICP) with a helical antenna is investigated in hydrogen gas. Characteristics of the RF hybrid plasma are measured by a Langmuir probe at a fixed position in the center between the RF powered and grounded electrode for various CCP powers of 50–150 W. The voltage drop across the CCP is found to be almost independent of the ICP power. The RF hybri… Show more
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