Characteristics of a mixed-gas cluster ion beam for time-of-flight secondary ion mass spectrometry

Lee, Sang Ju; Hong, Aram; Cho, Jinwan; Choi, Chang Min; Baek, Ji Young; Eo, Jae Yeong; Jun, Byeong; Byeon, W.J.; We, Jin Young; Hyun, Sangwon; Jeon, Minwoo; Jeon, Choelho; Ku, Dong Jin; Choi, Myung Chul

doi:10.1016/j.apsusc.2021.151467

Cited by 8 publications

(1 citation statement)

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“…Interest in the processes of interaction of gas cluster ions with solids is due to the role that particle beams play in modern fundamental research and practical applications. Over the past two decades the gas cluster ions beams have been successfully used both for modification (ultraprecise polishing, implantation at ultra-low depths) [1][2][3][4][5], and for surface analysis by secondary ion mass spectrometry (SIMS) [6,7] or X-ray photoelectron spectroscopy (XPS) [8,9].…”

Section: Introductionmentioning

confidence: 99%

Preferential sputtering of alloys by gas cluster ions

et al. 2022

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Topography and composition of the surface of nickel-based alloys under irradiation with Ar2500+ cluster ions with the energy of 20 keV, and atomic Ar+ ions with the energy of 3 keV have been studied. It has been experimentally found that the surface of the alloys is depleted by a component with a lower binding energy. It is shown that the change in the surface concentrations of the alloy components upon irradiation with cluster ions is an order of magnitude greater than upon sputtering with atomic ions. The degree of change in the surface composition is determined by the ratio of the sputtering yields of the alloy components. Keywords: gas cluster ions, ion sputtering, XPS, preferential sputtering, surface topography.

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