2013
DOI: 10.1016/j.tsf.2013.02.048
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Characteristics of a-plane GaN films grown on optimized silicon-dioxide-patterned r-plane sapphire substrates

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Cited by 7 publications
(4 citation statements)
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“…However, the use of an m -plane bulk substrate increases the cost of devices. Moreover, a nonpolar-plane-based heteroepilayer grown on a -plane GaN or r -plane sapphire substrates is still needed to prevent the formation of structural defects such as prismatic and basal stacking faults as well as partial dislocations to ensure sufficient crystal quality [ 5 , 6 ]. In fact, the results of research on GaN nanorods (NRs) and nanowires (NWs) have produced advances and interesting outcomes in a number of application fields [ 7 9 ].…”
Section: Introductionmentioning
confidence: 99%
“…However, the use of an m -plane bulk substrate increases the cost of devices. Moreover, a nonpolar-plane-based heteroepilayer grown on a -plane GaN or r -plane sapphire substrates is still needed to prevent the formation of structural defects such as prismatic and basal stacking faults as well as partial dislocations to ensure sufficient crystal quality [ 5 , 6 ]. In fact, the results of research on GaN nanorods (NRs) and nanowires (NWs) have produced advances and interesting outcomes in a number of application fields [ 7 9 ].…”
Section: Introductionmentioning
confidence: 99%
“…To simplify the manufacturing process, direct ELOG, which means that the a-plane GaN films directly grown on silicon-dioxide-patterned r-plane sapphire substrates, have been proposed. 17,18) Low defect density and decreased anisotropy have been achieved by this technique, but these GaN films still need to be thicker than 10 μm to get fully coalesced.…”
mentioning
confidence: 99%
“…In this letter, we report on nonpolar a-plane (11)(12)(13)(14)(15)(16)(17)(18)(19)(20) GaN films with high crystalline quality and decreased anisotropy directly grown on Ti-PSS. This technique is highly advantageous for thinner coalescence thickness, lower cost, and easier realization.…”
mentioning
confidence: 99%
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