Characteristics of film type inductors using a FeZrBAg magnetic material

Song, Jae–Sung; Min, Bok Ki; Jeong, Dae-Yong; Kim, H.S.; Heo, Jang

doi:10.1016/s0304-8853(01)00261-x

Cited by 19 publications

(2 citation statements)

References 3 publications

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“…Considerable research has been recently devoted to the characterization of magnetic thin films for their wide range of applications. The miniaturization of compact magnetic devices for high‐frequency communication over the last few years has seriously progressed, such as thin‐film inductors and transformers, with low core loss 1–5. Yttrium iron garnet (YIG) materials are of great interest in magneto‐optical and microwave communication industries due to their low dielectric loss, high resistivity (2.5 × 10 6 Ω m) and narrow absorption line width in the X‐band frequency range (8–12 GHz).…”

Section: Introductionmentioning

confidence: 99%

Improvement of the multilayer morphology (alumina/Cu/YIG/Cu) to characterize YIG thin film

Khalil

Siblini

Chatelon

et al. 2011

Physica Status Solidi (a)

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International audienceThe aim of our study is to characterize yttrium iron garnet (YIG) thin film for its applications in the microwaves and magnetooptical domains. For this purpose, we have manufactured a microinductor by deposition of YIG film between two copper layers on an alumina substrate. Multilayers have been deposited by radio-frequency magnetron sputtering technique. Thin films of YIG are amorphous after deposition; a post-thermal annealing at 740 8C for 2 h is necessary to obtain satisfactory magnetic properties. In this work, we have studied the effects of different parameters concerning the substrate surface state, deposition and post-thermal treatment of YIG and copper thin films on their structure and morphological properties. We have come against several mechanical and electrical problems: crack formation, detachment of YIG or Cu films from the substrate, deterioration of Cu films, open or short circuits. The roughness of alumina substrate and the annealing mode play an important role on the quality of themicroinductor prototype. After several tests by varying different parameters, we have established a protocol permitting to manufacture a prototype of good quality. This prototype is characterized using: profilometry, scanning electron microscopy, X-ray diffraction, vibrating sample magnetometry, and a precision LCR meter

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Section: Introductionmentioning

confidence: 99%

Improvement of the multilayer morphology (alumina/Cu/YIG/Cu) to characterize YIG thin film

Khalil

Siblini

Chatelon

et al. 2011

Physica Status Solidi (a)

View full text Add to dashboard Cite

show abstract

“…Under this condition, the thin film inductors appear. Numerous studies on development of thin film magnetic material [1][2][3], design and fabrication process of the devices have been performed [4][5][6], but up to now it only had been used in the Micro-DC/DC converter, whose converter operation is just 3 MHz, and quality factor 1-2 [7,8]. It has not been applied at higher frequency, because its properties are limited by the resonance frequency and Q factor.…”

Section: Introductionmentioning

confidence: 99%