Characteristics of Mobile Ions in the SiO&lt;sub&gt;2&lt;/sub&gt; Films of SiC-MOS Structures

Jang, Sujeong; Song, Ho‐Jun; Oh, Kyunghui; Lee, K.H.; Lim, Yongdo; Cho, Nam Ihn

doi:10.4028/www.scientific.net/msf.389-393.1017

MSF

2002

DOI: 10.4028/www.scientific.net/msf.389-393.1017

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Characteristics of Mobile Ions in the SiO<sub>2</sub> Films of SiC-MOS Structures

Sujeong Jang

Ho‐Jun Song

Kyunghui Oh

et al.

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Characteristics of Mobile Ions in the SiO<sub>2</sub> Films of SiC-MOS Structures

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