Characteristics of multi-element (ZrTaNbTiW)N films prepared by magnetron sputtering and plasma based ion implantation

Feng, Xingguo; Tang, Guangze; Ma, Xinxin; Sun, Min; Wang, Liqin

doi:10.1016/j.nimb.2013.03.001

Cited by 29 publications

(11 citation statements)

References 32 publications

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“…We can affirm that the implantation of heavy Au -ions with the concentration up to 2.1-2.2 at % leads to an increase in the hardness almost by 15-20% and an increase in plasticity index higher than 0.1. These results confirm the results of measurements of nanohardness of the (ZrTaNbTiW)N high entropy alloy under the plasma ion implantation of nitrogen ions with a dose from 0.8 × 10 16 to 2 × 10 17 cm -2 [7]. The further increase in the implantation dose to 4 × 10 17 cm -2 leads to a decrease in hardness and plasticity index.…”

Section: Resultssupporting

confidence: 88%

Influence of implantation of Au− ions on the microstructure and mechanical properties of the nanostructured multielement (TiZrHf VNbTa)N coating

et al. 2015

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Abstract-It has been found that the phase with the fcc lattice of the NaCl structural type is formed due to the vacuum arc deposition of the nanostructured multicomponent (TiZrHfVNbTa)N coating. Implantation of negative Au -ions with a dose of 1 × 10 17 cm -2 leads to the formation of a disordered polycrystalline struc ture without a preferred orientation of the fcc phase and nanocrystallites from 5-7 to 1-3 nm is size, which are dispersed in a layer up to 35 nm in depth. Nanohardness increases to 33 GPa, and the Vickers hardness reaches 51 GPa. Gold nanoclusters are formed in the near surface region, while the fcc lattice and the for mation of local Au regions are observed in the coating itself. Fragments with the hcp lattice are formed at depths above 180 nm because of the low nitrogen concentration.

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Section: Resultssupporting

confidence: 88%

Influence of implantation of Au− ions on the microstructure and mechanical properties of the nanostructured multielement (TiZrHf VNbTa)N coating

et al. 2015

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“…High fluences of implantation (1−2 × 10 17 cm −2 ) led to improving different mechanical characteristics, such as hardness [23,24]. However, the overview of published studies shows that the used implantation fluence ranges are quite small, especially for improving physicomechanical characteristics [25][26][27][28]. By the way, there are no studies on implantation of high fluences of N + ions (up to 10 18 cm −2 ), when the…”

Section: Introductionmentioning

confidence: 99%

Structure and Physicomechanical Properties of Nanostructured (TiHfZrNbVTa)N Coatings after Implantation of High Fluences of N⁺(10¹⁸cm^-2)

et al. 2017

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New classes of high-entropy alloys, which consist of at least 5 main elements with atomic concentrations 5-35 at.%, are under great interest in modern material science. It is also very important to explore the limits of resistance of high-entropy alloy nitrides to implantation by high-energy atoms. Structure and properties of nanostructured multicomponent (TiHfZrNbVTa)N coatings were investigated before and after ion implantation. We used the Rutherford backscattering, scanning electron microscopy with energy dispersive X-ray spectroscopy, high resolution transmission electron microscopy and scanning transmission electron microscopy with local microanalysis, X-ray diffraction and nanoindentation for investigations. Due to the high-fluence ion implantation (N + , the fluence was 10 18 cm −2 ) a multiphase structure was formed in the surface layer of the coating. This structure consisted of amorphous, nanocrystalline and initial nanostructured phases with small sizes of nanograins. Two phases were formed in the depth of the coating: fcc and hcp (with a small volume fraction). Nitrogen concentration reached 90 at.% near the surface and decreased with the depth. Nanohardness of the as-deposited coatings varied from 27 to 34 GPa depending on the deposition conditions. However, hardness decreased to a value of 12 GPa of the depth of the projected range after ion implantation and increased to 23 GPa for deeper layers.

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“…Most of HEA nitrides consist of 5, 6 or 7 elements, but they can incorporate up to 19 elements [38][39][40][41][42][43][44][45] resistance remains still largely unexplored. For the last few years several papers, devoted to the influence of Cu -, Au -, N + ion implantation on hardness, plasticity index and corrosion resistance were published [46][47][48][49][50]. Improvement of different characteristics, such as hardness, were found in the case of relatively high doses of implantation (1-2)Á10 17 cm À2 [46,49,[51][52][53].…”

Section: Introductionmentioning

confidence: 99%

Nanostructured multielement (TiHfZrNbVTa)N coatings before and after implantation of N+ ions (1018cm−2): Their structure and mechanical properties

Pogrebnjak

Бондар

Borba

et al. 2016

Nuclear Instruments and Methods in Physics Research Section B:

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a b s t r a c tMultielement high entropy alloy (HEA) nitride (TiHfZrNbVTa)N coatings were deposited by vacuum arc and their structural and mechanical stability after implantation of high doses of N + ions, 10 18 cm À2 , were investigated. The crystal structure and phase composition were characterized by X-ray diffraction (XRD) and Transmission Electron Microscopy, while depth-resolved nanoindentation tests were used to determine the evolution of hardness and elastic modulus along the implantation depth. XRD patterns show that coatings exhibit a main phase with fcc structure, which preferred orientation varies from (1 1 1) to (2 0 0), depending on the deposition conditions. First-principles calculations reveal that the presence of Nb atoms could favor the formation of solid solution with fcc structure in multielement HEA nitride. TEM results showed that amorphous and nanostructured phases were formed in the implanted coating sub-surface layer ($100 nm depth). Concentration of nitrogen reached 90 at% in the near-surface layer after implantation, and decreased at higher depth. Nanohardness of the as-deposited coatings varied from 27 to 38 GPa depending on the deposition conditions. Ion implantation led to a significant decrease of the nanohardness to 12 GPa in the implanted region, while it reaches 24 GPa at larger depths. However, the H/E ratio is P0.1 in the sub-surface layer due to N + implantation, which is expected to have beneficial effect on the wear properties.

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Characteristics of multi-element (ZrTaNbTiW)N films prepared by magnetron sputtering and plasma based ion implantation

Cited by 29 publications

References 32 publications

Influence of implantation of Au− ions on the microstructure and mechanical properties of the nanostructured multielement (TiZrHf VNbTa)N coating

Influence of implantation of Au− ions on the microstructure and mechanical properties of the nanostructured multielement (TiZrHf VNbTa)N coating

Structure and Physicomechanical Properties of Nanostructured (TiHfZrNbVTa)N Coatings after Implantation of High Fluences of N⁺(10¹⁸cm^-2)

Nanostructured multielement (TiHfZrNbVTa)N coatings before and after implantation of N+ ions (1018cm−2): Their structure and mechanical properties

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Characteristics of multi-element (ZrTaNbTiW)N films prepared by magnetron sputtering and plasma based ion implantation

Cited by 29 publications

References 32 publications

Influence of implantation of Au− ions on the microstructure and mechanical properties of the nanostructured multielement (TiZrHf VNbTa)N coating

Influence of implantation of Au− ions on the microstructure and mechanical properties of the nanostructured multielement (TiZrHf VNbTa)N coating

Structure and Physicomechanical Properties of Nanostructured (TiHfZrNbVTa)N Coatings after Implantation of High Fluences of N+(1018cm-2)

Nanostructured multielement (TiHfZrNbVTa)N coatings before and after implantation of N+ ions (1018cm−2): Their structure and mechanical properties

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Structure and Physicomechanical Properties of Nanostructured (TiHfZrNbVTa)N Coatings after Implantation of High Fluences of N⁺(10¹⁸cm^-2)